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If the product malfunctions, please return the valve as it is. 10 VT307-OMQ0002-B Revision history A Precautions on Design / Selection QZ B Renewal VS 1st printing:QV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

URL http://www.smcworld.com 4-14-1 Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Tel: 03-5207-8271 Fax: 03-5298-5361 2021 SMC Corporation All Rights Reserved 15 -

Light/Surge Voltage Suppressor How to Exchange Solenoid Valve, Pilot Valve Assembly Plug-in type Non plug-in type (VFR5 00) (VFR5 10) Plug-in type, Non plug-in type (VFR5 00 VFR5 10) Light/Surge voltage suppressor is not available for grommet type.

Add 10 g for conduit type, 30g for DIN terminal type, 60 g for conduit terminal type respectively. Refer to Glossary of Terms on page 6 for detail of max. operating pressure differential and max. system pressure. 10 Select an option mark in page 7 by Applicable Fluids Check List for special fluids outside of the standard.

Description Note 1 Rod cover 2 Tube cover 3 Piston 4 Piston rod 5 Bushing 6 Cushion valve 7 Speed controller valve 8 Clevis bushing 9 Hexagon socket head plug Rc1/4 10 Pin 11 Cotter pin 12 Flat washer 13 Cushion seal retainer 14 Wear ring 15 Cushion seal 16 Cushion valve seal 17 Speed controller valve seal 18 Coil scraper 19 Rod seal 20 Piston seal 21 Tube gasket 22 Cushion ring 24 Fig. 10

Function Function Terminal name Terminal name 24 V 1 1 COM+ COM+ 24 V 0 V 2 2 COM COM 0 V Pulse signal 3 3 NP+ NP+ Pulse signal Pulse signal 4 4 NP NP Pulse signal Note 1) Note 1) Pulse signal 5 5 PP+ PP+ Pulse signal Pulse signal 6 6 PP PP Pulse signal Input 7 7 SETUP SETUP Input Input 8 8 RESET RESET Input Input 9 9 SVON SVON Input Input 10 10 CLR CLR Input 11 11 12 12 Load Load 13 Output

22.6 5.75 Vacuum supply port 2-3.3 Mounting hole Vacuum pad connection port 0X: M5 x 0.8 0XY: M6 x 1.0 0X: M5 x 0.8 0XY: M6 x 1.0 Connector type ZSE3-0X-C 7 50.6 Vacuum supply port Vacuum pad connection port 20.5 RESET button DOWN button Pneumatic circuit SET button UP button Lead wire length 600 50 (3000) 10 58 PV 18 10.2 8 6.5 10.25 10 22.6 5.75 Vacuum pad connection port Vacuum supply

, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51 43 34 IN 26 17 85 MGF 201 181 161 141 121 101 80 0UT 60 40 201 Symbol Specifications 16 8 XA MGZ 151 136 121 106 91 76 60 IN 45 30 151 Change of rod end shape Heat resistant cylinder (10 to 150C) XB6 314 283 251 220 188 157 126 0UT 94 63 314 20 10 MGT XB9 Low speed cylinder (10 to 50 mm/s) 236 212 189

As a guide, insert bolts in 2 locations for 2-5 stations, 3 locations for 6-10 stations, 4 locations for 11-15 stations, and 5 locations for 16-20 stations. 2. When using the manifold with DIN rail in an environment where any vibration or impact is applied to it, the DIN rail itself may be broken.

JIS symbol 2 port valve 3 port valve 10 4. Construction (2) VHK2A(R) VHK3A(R) (9) (4) (1) (5) (3) (11) (10) (7) (8) (6) No.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply 24 VDC Class2, 2 A Output DeviceNetTM status

8 4 IN 38 27 23 19 11 15 8 MTS 79 68 57 34 45 23 OUT 113 12 6 60 51 43 26 34 17 IN 85 OUT 201 141 121 101 80 60 40 16 8 151 IN 106 91 76 60 45 30 Made to Order Specifications (For details, refer to pages 1955 to 2021.) 220 188 157 126 94 63 OUT 314 20 10 165 142 118 94 71 47 236 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Symbol Specifications -X7 -X9 -X11 -X33 -

Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.

Lock keys (refer to P9) Minimum pressure (F_1) adjusting range Maximum pressure (F_2) adjusting range 120% 100% 100% 90% 10% 0% 0% 4 0 0 0 12 10 20mA 20mA 4 0 0 0 12 10 20mA 20mA 2.5 5V 2.5 5V 5 10V 5 10V (Note1) F_1 is adjustable in a range from 0% to 90% of the rated value. (Default value : 0%0.00MPa) (Note2) F_2 is adjustable in a range from 10 to 120% of the rated value.

The read resistance of one connector should be in the range of 2.5 to 10 m. Installation 1 0 The SI unit does not have mounting holes, so it cannot be installed alone. Make sure to connect the valve manifold. When an input block is not required, connect the end plate directly to the SI unit.

Up to 10 units (including the SI unit) can be connected to one manifold. 3 4 3 4 RD4 Danger: Green ST(M) LED is flashing. Either of the following conditions: The valve ON/OFF counter has exceeded the set value. The valve is short circuited or disconnected. Red ST(M) LED is flashing.

Hold/Clear/Forced ON Fail safe Short circuit protection Protection -10 to 50 oC (Max. surrounding air temeprature rating: 50 oC) Operating temperature Danger: DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. (2)Add more I/O units. Up to 10 units (including the SI unit) can be connected to one manifold.