15

76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10 x 1 87 18.5 13.5 32 111 23 CY1SG25-Z RJ1412LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 99 90 42 4.5 9 16.5 21.5 M14 x 1.5 96 18.5 13.5 32 111 44 -X CY1SG32-Z RJ2015HN M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 50 3 5.5 11 91 18.5 24.5 M20 x 1.5 116 18.5 12.5 31

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

1

3/8 XSA2-43V 67 22 25 11.5 5 10 78 67.5 54 61.5 67.5 59.5 61.5 XSA3-32S 63 31.5 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet

Non-contact Gripper

Air supply port Urethane pad Recommended sensor Pressure sensor PSE540 Series Flow sensor PFMV Series For the method of selecting and using a sensor, refer to the operation manual. 728 Non-contact Gripper XT661 Series Low Profile Cyclone Type (-X260) Made to Order Low profile Thickness: 1.8 mm Weight: Approx. 1.3 g* Outer body diameter (mm) 20 25 Air consumption [L/min (ANR)] 31 31 * Outer

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 42 24.5 11 6 48 27 14.5 10 58 31 20.5 N S U F GN GS J K A ZP3 Y 04 06 08 B B5 15 61 44.5 10 20 68.5 52 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 20 B Model 4 D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

RSH

mechanism+ cancel cap+ lever detection switch Stroke W Bore (mm) R S T U V WB X Y q SRSH Bore size A, #2 (#2+#5) : RSH Bore size -lll-D 50 30 72 40 21 2 5.5 15.5 32 5 10 24 SRSH Bore size A, #3 (#3+#5) : RSH Bore size -lll-C SRSH Bore size A, #4 (#4+#5) : RSH Bore size -lll-S 63 30 87.5 47 24.5 3.5 6.4 16 38.5 5 10 24 SRSH Bore size B, #1 (#1+#5) : RSH Bore size -lll-DC 80 40 109 54 31

RZQ

43 31.5 43.5 28.5 40.5 30 42 34 46 33 45 50 29.5 40 33.5 44 34 44.5 31 41.5 32.5 43 36.5 47 35.5 46 RB 63 33 43 37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 Data

Compact Cylinder

M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory) CL CD hole H9 CZ M CX M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW CX CZ M RR 20 25 32 40 50 63 8 3 12 20 16 35 22 9 M5 8 3 12 20 16 40 26 9 M5 10 5.5 12 22 26 45 32.5 9.5 M6 12 5.5 15 25 28 51 38 12 M6 12 6.5 15

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

MLGC

150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30 160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31

08-cs1-e

Rod seal CS1-180A-PS Piston seal CS1-200A-PS 24, 29 and 31 are non-replaceable parts, so they are not included in the seal kit.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(2.4) 6H9 (+0.030 0 ) depth 7 Lock cable Cable length 400 Body mounting reference plane (B dimension range)1 4 x M8 x 1.25 thread depth 13 65 (8.5) Cable length 250 65 (164.5) (2.4) (138.5) (8.5) 7 74 Motor cable 6H9 (+0.030 0 ) depth 7 60 106 (170) L 13 (86) A (Table traveling distance)2 86 62.4 Stroke (90) [88]4 88 [(90)]4 90 4 [2]4 2 [(4)]4 (60) 61 (8.5) [Origin]4 Origin3 (60) (68) 31

Electromagnetic Digital Flow Switch

Lead wire and M12 connector (31) (24) (45) Brown Cable Specifications (3000) (30) White Conductor Nominal cross section area AWG21 External diameter Approx. 0.9 mm 3: Blue 4: Black Blue Insulator Material Non-lead heat resistant PVC Pin no.

LJ1H

B A C D 31 32 Standard Motor 100W Series LJ1H20 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 15mm/5mm lead Vertical Mount How to Order Stroke LJ1H202 PF 1 K F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial

06-mgz-e

. @9, #4, #5, #6, #7, #8, #9, $0 Rod seal B 31 Piston seal Seal kits consist of items @9 and #4 to $0, and can be ordered by using the seal kit number corresponding to each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

07-cvs1-e

Contents Bore size (mm) @6 @7 28 @9 #0 31 #2 33 Lube type Piston seal Rod seal CVS1-40-PS 40 50 63 80 100 CVS1-40-PS CVS1-50-PS CVS1-63-PS CVS1-80-PS CVS1-100-PS CVS1-50-PS Cushion seal Set of left nos. @6, @7, @9, #0, #2, #5 CVS1-63-PS Cylinder tube gasket 28, 31, 33 and 34 are non-replaceable parts, so they are not included in the seal kit.

IN20267

Row 1 is the current MPC position value and status flags sent from the MPC. 31 - IN20267 Version Page 15.4. Click Version to see the versions of the firmware of the MPC. Figure 15-4 Firmware Version Page 32 - IN20267 Ethernet MPC Status Page 15.5. Click Status to see the current MPC Position and status of Ethernet MPC.

Thermo-con/Rack Mount Type

(Page 20) Communications RS-232C/RS-485 Weight Approx. 14 kg Approx. 18 kg Approx. 21 kg Approx. 31 kg Approx. 33 kg Accessories Power supply connector, Operation Manual Power supply cable should be ordered as an option (sold separately, page 22) or prepared by the user.

HRL

of the product (e.g., operation status and content of alarm) To run/stop the product To change the set value of circulating fluid temperature Wiring of Interface Cable for Serial Communication Item Specifications Connector type D-sub 9-pin female (socket) type Configuration of connection RS-485 One thermo-chiller for one host computer, or multiple thermo-chillers for one host computer. (31

Refrigerated Air Dryer

.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H N M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9 [125] 12.0 [304] 1.3 [33] 2.9 [73] 1.2 [31] 1.4 [36] 6.1 [154] 0.8 [21] 13.0 [330] 0.6 [15] IDFB3E IDFB4E to IDFB11E B Q A D E Compressed air inlet Illuminated switch Compressed air