Flame Resistant

0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.

AU

1 Filter Bowl assembly Lubricator AF11-2 AF11-3 AL12-2 AL12-3 14-3-11 2 Series AU Flow Characteristics Inlet pressure: 1.0 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics Inlet pressure: 0.7 MPa, Outlet pressure: 0.2 MPa, Flow rate: 20 l/min (ANR) Outlet pressure (MPa) Outlet

Style, Vacuum Switch Model: E14 (1 Output w/o Analog Output, 3 Rotation), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: L (With Lock Nut), Made to Order: None, CE Compliant: Q (CE compliant)

SI unit ( device)

Dimensions for installation L: Dimensions n: Number of stations L n 2 3 4 5 6 7 8 9 10 L1 133.4 166.4 199.4 232.4 265.4 298.4 331.4 364.4 397.4 L2 117 150 183 216 249 282 315 348 381 -11No.EX-OMY0021 Wiring Select the appropriate cables to mate with the connectors mounted on the SI unit.

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

DOC1003077

F Main power switch L Power supply cable (Accessory, with Ferrite core) Each presses of the [MODE] key changes the operating mode as follows.

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

SI unit ( device)

Designation Description 1 L+ +24 V for SI unit 2 SV24 V +24 V for solenoid valve 3 L0 V for SI unit 4 C/Q IO-Link communication line 5 SV0 V 0 V for solenoid valve FE terminal Connect the FE terminal to ground.

ATX-OM-F004E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions Model HAA15-10 HAA22-14 PORT SIZE 1B union 11/2B union A 460 588 B 394 484 C 33 52 D 70 70 E 59 60 F 485 580 G 428 505 H 320 333 J 150 150 K 150 150 L 320 400 M 70 94 N 58 65 P 200 200 Q 480 610 R 220 220 S 225 238 HAA Series 6 4 1) Outer dimensions ATX-OM-F004E Air-Cooled Aftercooler

Multi-channel Digital Sensor Monitor

Remarks Power supply/output cable ZS-26-L Length 2 m Connector for sensor lead wire ZS-28-C 1 pc.

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts Description Body Adapter plate End plate Retainer Spool valve Piston Spring Sub-plate Note Platinum silver Platinum silver Platinum silver No. q w e r t y u i Material Aluminium die-casted Aluminium

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

High Purity Fluoropolymer Needle Valve Series LVN 1

PB Tightening torque for piping Torque (N.m) Body class 1.5 to 2.0 2 3.0 to 3.5 3 7.5 to 9 4 17-5-133 3 Series LVN Flow Characteristics (Fluid: Water) LVN20 LVN30 LVN40 14 4 4.5 7 8 12 3.5 Differential pressure Differential pressure Differential pressure 6 10 P0.05MPa P0.05MPa P0.05MPa 3 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) 5 8 P0.03MPa P0.03MPa 2.5 4 P0.03MPa 2 6 3 1.5 4

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Table of Contents - Tubing

How to Use Caution q The multiple tube holder can be cut apart according to the number of tube to be connected.

RSQ

MK(2) Rod end configuration Configuration Rounde bar type Chamfered type Roller type Lever type (Non-adjustable) (3) Application Basic style With cancel cap With lock menchanism With lock & cancel Symbol Nil K R L B C D E Bore size RS Q G Piping 12 16 20 32 40 50 12 mm 16 mm 20 mm 32 mm 40 mm 50 mm Nil F Screw-in piping Built-in One-touch fittings (2) RS H A Note 2) Bore sizes available

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

Note 3) When specifying the negative common specifications of the L kit, suffix N to the kit symbol. 578

Heavy Duty Stopper Cylinder Series RSH/RS1H ø20, ø32 ø50, ø63, ø80 3

With cancel cap With lever detection switch Q Note 2) Direction of transfer Note 1) Options can be combined.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Electrical entry MO: M-type plug connector without connector M: M-type plug connector with lead wire L: L-type plug connector with lead wire G: Grommet (DC specification) LO: L-type plug connector without connector With light/ surge voltage suppressor With

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

Bracket VFS Electrical entry VFR G: Grommet (DC specification) L: L-type plug connector with lead wire LO: L-type plug connector without connector M: M-type plug connector with lead wire MO: M-type plug connector without connector Body type 2 Body ported VQ7 With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage