SMC Corporation of America
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Thermo-chiller HRS offers convenient functions, self diagnosis and check display for easy maintenance.  An angled supply port facilitates the supply of circulating fluid, even when units are stacked.  A large digital display provides a clear view of the current and set values.  The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS filter

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

L2 L3 M D2 D2 L1 L1 L4 L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Metric L4 L5 A1 A2 M MAX.

4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

Center of gravity *MHM-25D-X7400A-DTP Z TCP Y X Flange mounting surface MHM-25D-X7400A-DTP MHM-25D-X7400A-HC10DT MHM-25D-X7400A-HC10 X Y Z X Y Z X Y Z Center of gravity(mm) 2.4 0.0 42.6 1.0 -0.4 57.1 1.0 -0.4 57.9 X Y Z X Y Z X Y Z Tool Center Point(TCP) 0 0 114 0 0 138 0 0 140 17 - 4.

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

Manufacture of 3 m and 5 m types is also possible. Please consult SMC for these types.

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Figure 2-1 Y 'a\ ' ( )Y 'J *Tl /\S-l_l 1 Swttch 2 Switches San Slde 2 Switches Flgwa 2-2 Flgur 2-3 Flgurc 2-4 Series NCDQT 1-2). Boro 106 (1116") 400 (4") Auto switch installation.

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 Fluid temperature [C] Series PF2D For Deionized Water and Chemicals Digital Flow Switch How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Note 1) Output specifications Note 1) Fixed units: Real-time

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

Description Standard Option y q w e r t y u Clip Stainless steel Tube assembly Stainless steel, Cu Stainless steel/Ag u Coil assembly Class H IN Armature assembly Stainless steel, PTFE Stainless steel, FKM Seal PTFE FKM Return spring Stainless steel Body Stainless steel C37 Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material:

Figure 2-1 Y 'a\ ' ( )Y 'J *Tl /\S-l_l 1 Swttch 2 Switches San Slde 2 Switches Flgwa 2-2 Flgur 2-3 Flgurc 2-4 Series NCDQT 1-2). Boro 106 (1116") 400 (4") Auto switch installation.

IDFmF-m-K IDF4E to 75E IDFmE-m-L Refrigerant R407C (HFC) IDF F With a heavy-duty auto drain*1 (applicable to moderate pressure) IDF370D IDF370D-m-L IDU3E to 75E IDUmE-m-L With a motor type auto drain*2 IDF4E to 75E IDFmE-m-M p. 30 IDF190D, 240D IDFmD-m(-m)-M IDU3E to 75E IDUmE-m-M With a metal name plate IDF100F to 150F IDFmF-m-P p. 30 IDF4E to 75E IDFmE-m-R Refrigerant R407C (HFC) IDF D

) VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP (Lead wire length) VG G: 300 mm H: 600 mm 3-Rc 1/8 (Piping port) VP S070 X port (For external pilot port) VQ M5 x 0.8 (PE port) VKF VQZ VZ VS M plug connector (M) VZ34-M-01 DIN terminal (D) VZ34-D-01 L plug

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 77.00000 lb

PF_ _ ]) [] PL01 **LIT1 /DD1 0301h 0301h PL02 **LIM 1000 1000 [m] [m] PL03 **LID 1000 1000 [m] [m] PL04 *LIT2 /DD2 0003h 0003h PL05 LB1 0 00 [0.01re [0.01re v] v] PL06 LB2 0 00 [r/min] [r/min] PL07 LB3 / 100 [%] 100 [%] PL08 *LIT3 /DD3 0010h 0010h PL09 LPWM 30 30 [%] [%] PL17 LTSTS 0h 0h PL18 IDLV 0 0 [%] [%] 5 45 6 6 . 2 6.1 . 2 6.1.1 . 2 6.1.2 (MR Configurator2) . 3 6.2