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R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8

D-M9-5 () D-M9N-5 D-M9P-5 3 NPN PNP IC PLC DC51224V(4.528V) 10mA DC28V 40mA 10mA 0.8V (40mA 2V ) DC24V 100A ON CE RoHS D-M9-5 M2.54L 16 - 5. 5-1. 1. () 2. 3. 4. 1. 5-2. 1. 2. 3. 4. Nm JMHZ2-16D M3x0.5 0.59 17 - MOTOMAN-HC10 M6x12 6.3Nm 18 - M6x23 6.3 Nm M4x10 1.0Nm 19 - M8 M8 M8-MOLEX S1 S2 M4x8 1.0Nm 20 - (M4x6) (M4x6) 1.0Nm P175-2.

area (mm2) 2.1 4.0 Model L B D E F MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 6.5 8.5 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 B Model L A C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 Universal Elbow: MS-5UL Universal Tee: MS-5UT Width across flats 7 Width across flats

Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8

t V#6500 O.D.268 X I .D.225 X T3 1 pc. O.D.218 X I.D.175 X T3 1 pc. Gasket AL-62S AL63S 3 pcs. AL-31S y JIS B2401G35 5 pcs. O ring JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs.

ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D. d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H (Width across flats) (Width across flats) D3 D3 A1 L5 L5 A1 A2 D1 D1 A2 T T Inch L4 L5 A1 A2 M MAX.

Suite D Poway, CA 92064 Tel: (858) 679-1903 Fax: (858) 679 1904 SMC Pneumatics Inc. (Indianapolis) 3011 N Franklin Road Indianapolis, IN 46226 Tel: (317) 899 4440 Fax: (317) 898 4808 SMC Pneumatics Inc. (Boston) Zero Centennial Drive Peabody, MA 01960 Tel: (978) 326 3600 Fax: (978) 326 3700 SMC Pneumatics Inc.

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

1 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT325 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)55 x 118 x 53 (Grommet) C: 0.61 dm3/(sbar) {Rc 3/8 (Passage 2 3)} A single valve with 6 valve functions (Universal porting type)

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

TQ1230001-OM107 ModelZPG16J-7A-X2 ModelZPG(B25,B30)J-7A-X2 (Suction cup formMultistage bellows type 2.5-Stage) (Suction cup formMultistage bellows type 3.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -13No.

Auto switch Auto Switch Specifications D-M9(With indicator light) Auto switch model D-M9N D-M9P Electrical entry direction In-line Wiring 3-wire Output NPN type PNP type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage DC28V or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

Auto switch Auto Switch Specifications D-M9N(With indicator light) Auto switch model D-M9N Electrical entry direction In-line Wiring 3-wire Output NPN type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage

2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMS0006CN-G * FG (35 N () ,() *() 6 33 () () 30m DC(-)() * -6No.PS-OMS0006CN-G ( ) () CE/UKCA -5~50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F -100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D