HEC_W-E

HEC006 HEC012 HEC006 HEC012 Model No. label Model No. label Fig.4-1 Position of Model No. label Fig.4-2 Legend of Model No. label 4-2 Unit Overview 4.4 Appearance 4.4.1 HEC006 (C) 4xG D E A B F A B C D E F G HEC006 240 390 497 214 458 482 7 Unit: mm Fig.4-3 Outside drawings of HEC006 4-3 Unit Overview 4.4.2 HEC012 (C) 4xG D E A B F A B C D E F G HEC012 300 448 565 190 526 550 7 Unit: mm Fig

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center (A) Number of axis teeth =a (B) 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth =b 5.

Clamp Cylinder Series CK1

(Same surface) Hs 22 B A D-A93 24.5 10.5 16.5 50 50 50 D-M9B D-M9BW D-B54 50 50 75 Auto Switch Mounting Position and Its Height Unit: mm 8.5 Auto switch set value and its height 63 7.5 30.5 47 11.5 34.5 47 2 25 50.5 Auto switch Symbol 40 11 23.5 34.5 15 27.5 34.5 5.5 18 38 50 7.5 30.5 40 11.5 34.5 40 2 25 43.5 A B Hs A B Hs A B Hs D-B54 D-A93 Hs B A 33 D-M9B D-M9BW D-B54 12 Note 1) The

High Vacuum L Type Valve

Rc 1/8 Weight kg 0.28 0.47 1.1 1.7 3.1 5.1 9 XL-OMS0001-B 4-2.

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

HRX-OM-W002

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR012/018-A/W-10/20-Y HRR-TK001 Nut (M8) HRR024/030-A/W-20-Y Bolt (M8) Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

VFR5000-OMN0001

() A-(1) B+(3) B-(4) A B VFR510 A COM A B VFR520 A COM B 3 A COM B VFR5 40 5 8 VFR5000-OMN0001 VFR5000 Series/ (VFR500) (VFR510) VFR500 VFR510 () () 2.8Nm ) AC DC24V 3 (AB) (N.C.)

VFRA3000, 4000 Series

Effective area at supply side (mm2) PA 44 38 32 4 2 (A)(B) 4 2 (A)(B) Single Double S at P1=0.7MPa/P2=0.5MPa PB 38 40 31 Number of pilots Effective area at exhaust side (mm2) AEA 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 90 4 2 (A)(B) 4 2 (A)(B) 77 S at P2=0.5MPa BEB 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) How to Exchange Air Operated Valves Loosen set screw and take air operated valve out vertically

Digital Flow Switch (Integrated display type) ( compatible)

Min. to Max. a to b c to d PF3W7 oC Common 0 to 100 -10 to 110 0 to 1000 -100 to 1100 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

Series AP3100

B A B B 45 45 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 1.0 (25.4) 1.0 (25.4) AP3650 AP3657 1.88 (47.8) 0.44 (11.2) 3.02 (76.7) 0.13 (3.3) 0.4 (10.2) 1.87 (47.5) A B B 0.44 (11.2) 3.6 (91.4) 45 1.0 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) A B B Connections A B inch inch (mm) (mm) FV4 MV4 TW4 FV6 MV6 TW6 FV4 MV4 TW4 FV6 MV6 TW6

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

Digital Flow Switches

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

HRX-OM-R026

B operation Contact output signal 3 Sets alarm which is selected for contact output 3.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

With lock/226) 28 (64) Stroke 39 (4) 21 Motor cable (6) 70 58 47 6.7 17.5 Vacuum port Rc1/8 Note 3) 35 Encoder cable (7) Lock cable (4.5) Motor option B: With lock 8H9 ( ) depth 6 +0.036 0 13 n x 6.8 B 30 8H9 ( ) depth 6 +0.036 0 140 200 E C x 200 (= D) 25 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side.

Manifold Specifications

Cv C [dm3/(sbar)] b Cv 1.3 0.12 0.31 1.5 0.12 0.37 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.35 1.6 0.10 0.36 1.4 0.14 0.36 1.5 0.11 0.35 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Manifold Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

HRX-OM-W060

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center axis (B) Number of teetha 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5.