Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate
VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 3 mm 4.5 mm 6 mm 8 mm 10 mm 2 3 4 5 6 VX2 VX Refer to the table (1) given below for availability. Port size VX3 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.) / Single unit Normally open (N.O.) / Single unit VXA 3 8 1 2 Refer to the table (1) given below for availability.
Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: 01 (Rc1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment
Size: 01 (Size 01), Passage Symbol: FG (2 Position Double), Number of Solenoids: D (Double), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: Z (Light/Surge Voltage Suppressor), Sealing Type: Metal Seal, Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FG (2 Position Double), Number of Solenoids: S (Single), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: Z (Light/Surge Voltage Suppressor), Sealing Type: R (Rubber Seal), Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FJG (3 Position Exhaust Center), Number of Solenoids: D (Double), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: Z (Light/Surge Voltage Suppressor), Sealing Type: R (Rubber Seal), Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FG (2 Position Double), Number of Solenoids: S (Single), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: Z (Light/Surge Voltage Suppressor), Sealing Type: Metal Seal, Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FJG (3 Position Exhaust Center), Number of Solenoids: D (Double), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: Z (Light/Surge Voltage Suppressor), Sealing Type: Metal Seal, Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FG (2 Position Double), Number of Solenoids: S (Single), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: None, Sealing Type: Metal Seal, Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Passage Symbol: FG (2 Position Double), Number of Solenoids: S (Single), Rated Voltage: 3 (24 VDC), Light/Surge Voltage Suppressor: None, Sealing Type: R (Rubber Seal), Port Size: A02 (Side Ported, 1/4), Thread: T (NPTF)
Size: 01 (Size 01), Port Size: A01 (Side-ported 1/8), Thread: T (NPTF)
Size: 01 (Size 01), Port Size: A02 (Side-ported 1/4), Thread: T (NPTF)
Solenoid Direction: Opposite side of A port (A port bottom ported for Type 40), Type: 42 (A Port Side Ported; 42S: Solenoids on the Same Side of A Port), Stations: 01, Port Size: 01 (Rc 1/8), Thread: T (NPTF)
Similarly, for valves which had an “N” prefix, the thread type now needs to be indicated in the part number (e.g., symbol “N” for NPT thread or “T” for NPTF thread)
Valve part number example: Plug-in type NVT307-5DO-01→VT307-5DO-01T
Be aware that NVFR/NVFS series valves were of the body ground type.
If body grounding is required, suffix a “-Q” to the part number.
Cables, connectors and hub shall comply with the IEEE802.3 10BASE-T/100BASE-TX standard.
Table 1 Moment of inertia Size Allowable kinetic energy (J) 10 0.00015 15 0.00025 20 0.0004 30 0.015 40 0.03 How to calculate the load energy E : Kinetic energy (J) I : Moment of inertia (kg m Speed (rad/s) : Rotation angle (rad) 1803.14 rad t : Rotation time (s) 1 E = I 2 2 2 = t Table 2 Safety operable rotation time adjustment range Size Rotation time ( s / 90) 10 0.03 to 0.5 15
Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part
Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part
The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3-SCREEN HIGH PRECISION DIG PRESS SWITCH. 55.00000 lb. N59.