3-Position Rotary Table

12 V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

ZP3

adapter Vertical VAC VAC ZP3-T VAC p. 138 p. 144 p. 150 p. 156 With adapter Lateral ZP3-Y Construction Precautions Mounting Bracket Assembly VAC VAC VAC p. 139 p. 145 p. 151 p. 157 With adapter VAC VAC VAC Vertical ZP3-T p. 140 p. 146 p. 152 p. 158 With buffer Lateral ZP3-Y p. 141 p. 147 p. 153 p. 159 With buffer VAC VAC VAC 134 Compact Type ZP3 Series Specifications Pad Material Material

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Mini Free Mount Cylinder

(NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12 V 12 V Diagnostic indication (2-color indication) Auto switches marked with are produced upon receipt of order.

CRQ2

IC circuit Reed switch Solid state switch A96 A96V 5 V Grommet Yes Relay, PLC A93 A93V 12 V 2-wire 24 V 100 V 3-wire (NPN) M9N M9NV 5 V, 12 V IC circuit 3-wire (PNP) M9P M9PV 2-wire M9B M9BV 12 V Relay, PLC 3-wire (NPN) F9NW F9NWV 5 V, 12 V 24 V IC circuit Grommet Yes Diagnostic indication (2-color) 3-wire (PNP) F9PW F9PWV F9BW F9BWV 12 V 2-wire Water resistant (2-color) F9BA Although it

Stroke Reading Cylinder and Counter

12 V 12 V IC circuit Diagnostic indication (2-color indicator) Relay, PLC IC circuit 5 V, 12 V 12 V Yes Yes No Grommet 24 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V A96V A96 IC circuit 5 V 12 V Grommet 24 V A93V2 A93 A90 100 V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water resistant type auto switches can be mounted on the above models

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

LEY-OM007

SVRE ON 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG SV0.8* 1.RESET SVRE ON 2.SETUP SV10 No. -50- 1 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 2 /code1-196 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 20 16 20 16 20 Mounting position Mounting position 16 A 90 70 93 73 94 A A 74 B 110 90 107 87 106 B B 86 Operating range Note) 7.5 11 6.5 8.5 6.5 Operating range

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

ms) Short circuit protection Yes 0.2% F.S. 1 digit ZSP Repeatability Hysteresis Hysteresis mode Variable (0 or above) PS Window comparator mode Output voltage (Rated pressure range) 0.6 to 5 V 2.5% F.S. 0.8 to 5 V 2.5% F.S. 1 to 5 V 2.5% F.S.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

3-wire Grommet Yes Reed switch Z73 24 V 12 V 100 V Relay PLC 2-wire 5 V 12 V 100 V or less IC circuit Z80 No 3-wire (NPN) IC circuit 3-wire (PNP) Y7PV Y7P Y59A Y69A 5 V 12 V Lead wire length symbols: 0.5 m Nil (Ex.)

Free Mount Cylinder for Vacuum Series ZCUK

switch 12 V Relay, PLC Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equivalent) IC circuit A96V A96 5 V Grommet A93V A90V A93 A90 Relay, PLC 100 V 2-wire 24 V 12 V No IC circuit 100 V or less Refer to pages 796 and 797 for the details on auto switches with a prewired connector.

VHS20/30/40/50

SUP SUP IN OUT Applicable air preparation equipment Spacer with bracket P/N Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 Interface P/N AC20 AC25, AC30 AC40 AC40-06 AC50, AC60 Note) Y200 Y300 Y400 Y500 Y600 Y200T Y300T Y400T Y500T Y600T Spacer with bracket Note) Although connection to AC60 is possible, the flow rate may decrease due to the mounting position. 5-8-20 3 Series

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications Centralized control of multi-point lubrication (1) Model name D.P . Lube D.P . Lube Unit ALDU600 ALDU900 ALD900 ALD600 AV Model Low oil consumption volume 1 4 1 1 1 4 1 1 3 4 1 3 4 1 AU Simplified oil feeding volume setting in which only the pressure differential is adjusted.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

G SMC H F P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH.

D. P. Lube (Unit) Series ALD(U)600/900

P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications Centralized control of multi-point lubrication (1) Model name D.P . Lube D.P . Lube Unit ALDU600 ALDU900 ALD900 ALD600 AV Model Low oil consumption volume 1 4 1 1 1 4 1 1 3 4 1 3 4 1 AU Simplified oil feeding volume setting in which only the pressure differential is adjusted.