L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38
42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-8 9 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported
Note 2) The use of a regenerative absorption unit is recommended for any operating conditions.
Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable
VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port 1/2" 3(R) port VFS 2 x M12 M5 x 0.8 Ground screw 4 x M8 VFR 117 B B 2 B 2 B 2 B 2 2 B B 2 2 0 0 BUS 19 3 1 69 55.5 53.7 1 60 12 X 51 1 2 VQ7 PWR 3 A 4 A 4 A 4 A 4 A 4 A 4 A 4 22 17 15.5 34 2 x M12 M3 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Note) The dimensions
Flow coefficient Port size Rc Proof pressure MPa Max. system pressure MPa Max. operating pressure differential MPa Weight g Orifice mm Cv Effective area mm Model N.C. 1/8 (6A) 2 0 VXA213 2 0 VXA212 2 0 VXA213 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA226 2 0 6 1.0 0.5 1.0 1.0 0.33 0.61 0.33 3 4.5 3 VXA212 11 6 170 0.5 1.0 0.6 0.2 0.1 1.0
Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration Certificate
Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: C6 (6mm), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration Certificate
Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 102R (Body Ported, 3 Port, Universal, Tubing Type), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)
Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override), Lead Wire Length: K (Plug Connector, 300mm)