48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

No more element replacement!

Quantity Note NBR 5 m, Cylindrical type END100-005 1 FN11l1l 20 m, Cylindrical type END100-020 1 5 m, Step type END110-005 1 5 m, Cylindrical type END200-005 1 FN11l2l 20 m, Cylindrical type END200-020 1 5 m, Step type END210-005 1 7 Low Maintenance Filter Series FN1/FN4 Construction FN4102l-20-Sl r o t i q y OUT w u e IN DRAIN Component Parts Replacement Parts No.

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Compact Cylinder

After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/4 turn for a port size of M3 x 0.5 or 1/6 turn for a port size of M5 x 0.8. For elbow type fittings, tighten an additional 1/2 turn for a port size of M3 x 0.5 or 1/3 turn for a port size of M5 x 0.8 if gaskets are mounted in two places.

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Power Clamp Cylinder

2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !0 Socket head cap screw 105 C CKZN-D050 Note 2) 120 B w Stopper bolt r Bumper !1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13 to 22 for details.)

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

SX

1-12.

rep-modular-e

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MXQ

1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Multi-Axis Step Motor Controller

. 1 23 23 Load Load AREA4 33 33 AREA4 N.C. 1 N.C. 1 4 4 Load Load INP1 14 14 INP1 N.C. 1 N.C. 1 24 24 Load Load INP2 34 34 INP2 N.C. 1 N.C. 1 5 5 Load Load INP3 15 15 INP3 N.C. 1 N.C. 1 Load Load 25 25 INP4 35 35 INP4 ALARM1 ALARM1 Load Load N.C. 1 16 N.C. 1 16 6 6 ALARM2 ALARM2 Load Load 36 36 N.C. 1 N.C. 1 26 26 ALARM3 ALARM3 Load Load 17 17 N.C. 1 N.C. 1 7 7 ALARM4 ALARM4 Load Load 37

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

1 i q !4 r e !0 !1 q i !2 o !3 y Meter-in type Component Parts No.