Return Filter FH100 Series

Precautions FH100-06 to 24: Nominal filtration 10 m q Mounting Confirm IN and OUT before mounting.

INFORMATION Step Motor Controller 5 types of communication protocols New New

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal * For , enter a number from the No. line in the table on page 6. Refer to the dimension drawings on page 6 for the mounting dimensions.

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e No pressure gauge 0 6 10 20 40 60 Q w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN e 4P 4PN 4000 psig/bar 3) 4 4B NPT 1/4 inch

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

Vacuum Module: Ejector System Series ZX

ZX1 1 10 F Filter unit Ejector unit Nil Q CE marked Ejector unit nozzle dia.

Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Mass (kg) Av x 10-6 (m2)Cv convertedVCS221/8 ( 6A)1/4 ( 8A)21.03.80.161.01/8: 0.211/4: 0.24

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O-Q; July 1995, 25(RP) Specifications subject to change without notice. Printed in Singapore

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Nil Without cable 1 1.5 3 3 5 5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on xed parts.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

How to Order LER10, 30, 50 Series LER Step Motor (Servo/24 VDC) Electric Rotary Table ®

0 q Table accuracy w Size e Max. rotating torque [Nm] r Rotation angle [] Nil H Basic type 10 30 50 LER50 320 Symbol LER10 310 LER30 LER10 Type 0.3 0.2 LER30 1.2 0.8 LER50 10 6.6 Symbol Nil 2 3 K J High precision type High torque Basic External stopper: 180 External stopper: 90 t Motor cable entry y Actuator cable type u Actuator cable length [m] 8 Nil S R Nil 1 3 5 8 A B C Without cable

ALF400 to 900, ALT-5/-9

3 !

ALF400 to 900, ALT-5/-9

3 !

S

Wire Solid State NPN 28VDC or less 150mA or less D-F7P 3 Wire Solid State PNP 100mA or less D-J79 2 Wire Solid State 24VDC (10~28V) 5 ~ 150mA D-F7NV 3 Wire Solid State NPN 28CVDC or less 150mA or less D-F7PV 3 Wire Solid State PNP 100mA or less D-F7BV 2 Wire Solid State 24VDC (10 ~ 28V) 5 ~ 150mA D-F7PW 3 Wire Solid State PNP 20mA or less D-J79W 2 Wire 24VDC (10 ~ 28V) 5 ~ 40mA D-F7BAL 2

Series HAW Water Cooled Aftercooler 1

R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324

VQZ Series

By changing the port plug into a fitting, it can be used as the 5 port single solenoid valves, too. 1 2 3 1 2 3 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 0 0 0 2 2 2 2 0 0 0 0 2 2 2 2 Base Mounted VQZ 85 ,N.C./VQZ 95 ,N.O. 1 1 1 1 3 3 3 3 1 1 1 1 3 3 3 3 3 port valves have the same external appearance as the 5 port valves.

of 10; price is per piece)*** $3.81 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-51A-C6 fitting assy, VQ1000/VQ20/VQ30 VALVE (sold in packages of 10; price is per piece)*** $3.81

SYJ Series

Prior to the shipment of a SMC product to another country, assure that all local rules goveming that export are known and followed. 3 No.SYJ3000-OMM0002-A SYJ Series Precautions for 3/5 Port Solenoid Valve Be sure to read before handling. Refer to main text for detailed precautions on every series. 10.

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb

Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter of LVM11: 1.5mm, Orifice diameter of LVM10: 1.4mm , Available with power-saving circuit , 2 port N.C. or N.O. types; 3 port Universal type , Diaphragm choice of EPDM, FKM or Kalrez« , Wetted part material: PEEK or PFA (body/plate), CHEMICAL VALVE, CHEMICAL VALVE, 2 PORT, B07, 0.034 lb