AS

2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

tubing size (mm) 1/8" x 0.086" No. 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No. 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7* 7* 7* 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 1/8" 1/4" x 5/32" 1/8" 1/4" 6 x 4 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 3/8" x 1/4" 1/8" 1/4" 1/2" x 3/8" 3/8" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) ey q t wr ey q t wr A A i i P R P R u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve ass'y Spool spring Description Sub-plate Pilot valve Note Zinc die cast Part No.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

1 2 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 5 2 1 3 4 32.4 32.6 15 18 M12 SPEEDCON w 4 3 5 1 2 Plug connector pin assignment A-coded (Normal key) 4.2 M12 SPEEDCON M12 SPEEDCON 17 3 4 Socket connector pin assignment A-coded (Normal key) Wiring #7 PCA-1557798 Y connector (2 x M8-M12) Socket connector pin assignment 40.7 9.9 15.8 8.3 14.8 1 q 1 3 3 4 1 2 3 4 1 2 1 4 21.8 21.7 13 12 M8 4 3 w 1 3 3 4

Air Slide Table Series MXQ

Graph (2) Allowable Moment Coefficient: $/0 1 $/0 2 $/0&* $/0&1 $/0*' $/0*. 1 + &'(. &) &1(. &,(. &1 &-(. *)(. ,' ,+ &,(. &1 &-(. *)(. ,' ,+ 1 + &'(. &) &1(. &(' 9 '(+ '(. ; # 3 * ) . 1 ( Table (4) Maximum Allowable Moment: Mmax (Nm) '() 8!

Speed Controller with One-touch Fitting

1 TMH o !0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

Soft Start-up Valve

22 AVA3000-03--A 3/8 3/8 3/8 1/8 76 65.6 50 29.5 20 20 38 38 Width across flats 24 AVA4000-04--A 1/2 1/2 1/2 1/8 98 75.6 56 39.5 26 26 36 49 Width across flats 30 AVA5000-06,10--A 3/4,1 3/4,1 3/4 1/8 128 78.6 59 53 37 37 55 53 Width across flats 36 Optional specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AVA2000-02--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Air Slide Table

My = 1 x 9.8 (10 + 30)/1000 = 0.39 A3 = 30 May = 1 x 1 x 18 = 18 Mymax = 18 K = 1 = 1 2 = 0.39/18 = 0.022 Examine Mr. Mr = 1 x 9.8 (30 + 10.5)/1000 = 0.39 A6 = 10.5 Mar = 36 Mrmax = 36 K = 1 = 1 '2 = 0.39/36 = 0.011 Find the static moment M (Nm).

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

Rotary Actuator

1 i !0 !2 q w o r With air cushion Without air cushion With auto switch !9 @1 @3 !7 !6 !8 @0 @2 Component Parts No.

CXS

Table 1.

reduces flow setting time

1 e !3 !4 o !0 !1 !2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

VZ5000

Note Platinum silver q Description Sub-plate Aluminum die-casted DXT199-7-1P DXT199-7-2P Rc 1 8 Rc 1 4 Piston plate Body u Resin r Aluminum, HNBR Black w e DXT170-CSolenoid assembly Epoxy/Stainless steel i Piston Spool valve Common with Series VZ 000 1 3 Thread type Nil: Rc F: G N: NPT T: NPTF Resin o O-ring NBR 13 x 11 x 1 Black painted t Resin End cover y Stainless steel Spool spring 3

Vacuum Unit Series ZK2

Single unit Note 1) Port exhaust B Ejector system t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications Common Silencer exhaust Pressure sensor C Type Pressure range [kPa] Specifications Symbol P 0 to 101 Analog output 1 to 5 V Pressure sensor For manifold T Analog output 1 to 5 V 100 to 100 Individual port exhaust A B C D E F H J K Q R S Unit selection function Note 9) NPN

MLGP

8 (plug) IF unlocking port XAH7 depth 6 2-Rc 1/8 Unlocks when pressurized PB GA GB J K PA + Stroke Q XAH7 depth 6 S G IE FA FB C + Stroke B + Stroke E Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.

MLGP

8 (plug) IF unlocking port XAH7 depth 6 2-Rc 1/8 Unlocks when pressurized PB GA GB J K PA + Stroke Q XAH7 depth 6 S G IE FA FB C + Stroke B + Stroke E Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.

Refrigerated Thermo-chiller

Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.