Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 1 Station, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: U (Port Location U Side, Internal Pilot), A, B Port Size: C8 (ø8 One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: None, Input Block Type, Common Spec: A (Positive Common, M12, 2 Inputs), Valve Stations: 12 Stations, P,E Port, SUP/EXH Block Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø5/16" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: B (Positive Common, M12, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Block Assembly: C (Port Location U Side, Internal Pilot, Built-in Silencer), P, E Port Size: N (ø3/8" One-touch Fitting)
AS Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
~~===rr-N"~e-_ ~~ =4It PNP, and analog output.
SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.
Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28
F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002-A6 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.
F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z INR-244-831 3-9 Troubleshooting 4 Troubleshooting The table below shows the solutions for the problems.
(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Stainless steel Lever pin i Steel lined oil imfilled acetal resin bearing Bearing o Compact cylinder
Bolt interferes with speed controller 712 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion Type Construction Closed condition r e @1 @0 !2 !6 !4 o t !8 i !9 !0 !7 !3 !5 u y q e w @2 !1 Open condition MHZ MHF MHL MHR MHK MHS MHC Component Parts MHT No.
Description Material Note q Body A White PBT Body B Brass Electroless nickel plated w Needle Brass Electroless nickel plated e Seat ring Brass r (1) Electroless nickel plated (2) Lock nut Brass t Red painted Handle Aluminum alloy y Red Push button POM u Cassette POM, Stainless steel i U seal o NBR Seal !0 NBR O-ring !1 NBR O-ring !2 NBR O-ring !3 NBR Valve core !
Description Material Note Aluminum alloy Hard anodized Side plate q Carbon steel Black zinc chromated Finger w Carbon steel Black zinc chromated Lever e Carbon steel Black zinc chromated Joint r Stainless steel Shaft t Stainless steel Joint pin y Soft steel Black zinc chromated Cylinder plate u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office
Description Note Aluminum die cast Aluminum die cast Aluminum cast Aluminum cast Platinum silver paint Platinum silver paint q Body Housing y Replacement Parts Part No. AF800 AF900 11345-5B AF11-4 JIS B2401 G130 No.
Description Note Body Valve guide Piston Bonnet Handle Adjusting spring Valve Material VEX PBT Brass Polyacetal Brass Brass Steel wire Brass q w e r t y u Replacement Parts Electroless nickel plated AW Mounting/Adjustment No.