Series: 5 (JSY5000), Type: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: Q [DeviceNetâ„¢ (Version A)], SI Unit Common, End Plate: 4 (Power Supply w/M12 Connector, PNP), I/O Unit Stations: None, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: U (Internal Pilot, U Side, 2 to 10 Stations), A,B Port Size: C10 (ø10 One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C4 (ø4 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: B (PNP Sensor Input, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: 2 Stations, Input Block Type: C (PNP Sensor Input, M8, 4 Inputs), Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: F (Internal Pilot, Built-in Silencer; Both Sides, 2 to 24 Stations), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 2 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: U (Internal Pilot, U Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 5 (JSY5000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 2 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C12 (ø12 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Size/Valve Type: 7 (Size: 32A; Valve Type: N.C.), Body/Port/Orifice: Q (Body Material: CAC407; Port Size: 32A Flange, Orifice Dia.: 35), Voltage/Electrical Entry: E (230VAC; Grommet w/Surge Voltage Suppressor)

NAME

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

MXU

76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q

Precision Clean Regulator

2 1 Body Stainless steel 316L 2 Valve guide Stainless steel 316 ARM 3 Spacer PPS e !1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

1) B Note 2) K Note 3) N None DIN rail length specified Back pressure check valve Special wiring specifications (Except double wiring) With name plate (Side ported only) Manifold mounting D E DIN rail mounting Direct mounting Note 1) Specify DIN rail length with D at the end.

Thermo-chiller Basic Type HRSE Series

Note 3) q Ambient temperature: 25C, w Circulating uid temperature: 20C, e Circulating uid rated ow, r Circulating uid: Tap water Note 4) Temperature at the thermo-chiller outlet when the circulating uid ow is rated ow, and the circulating uid outlet and return port are directly connected. Installation environment and the power supply are within specication range and stable.

Thermo-chiller

Accessories Weight10 [kg] 45 1 It should have no condensation. 2 If tap water is used, use water that conforms to Water Quality Standards of the Japan Refrigeration and Air Conditioning Industry Association (JRA GL-02-1994 cooling water system circulating type make-up water). 3 q Ambient temperature: 25C, w Circulating uid temperature: 20C, e Circulating uid rated ow, r Circulating uid: Tap

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual