Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

4/5 Port Air Operated Valve Series SYJA3000

both sides of R port.

Micro Mechanical Valve Series VM1000

VM120-01-30 (R, B, G, Y) A-X207 VM130-01-30 (R, B, G, Y) A-X207 Panel mounting hole 40 30.5 T.T. 28.6 0.8 to 7.5 3 1.5 1.5 Symbol 2 port (A) 2 R port (3 port only) (97.3) 43.7 12 10 1 (P) (68.7) 3 port (A) 2 5.5 25 10 12 14.5 14.5 1 (P) 3 (R) * 0.5 MPa supply 25.4 2 x 1/8 44 17 2 x 4.6 mounting hole F .O.F .* 27 N T.T. 6.7 mm VM220-02-30 (R, B, G, Y) A-X207 VM230-02-30 (R, B, G, Y) A-X207

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Air Fittings & Tubing

(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.

Electric Actuators

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Table of Contents

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

Vacuum System Peripherals:

(R) Vacuum spec. (V) Standard External pilot spec. (R) Standard External pilot spec. (R) Vacuum spec. (V) Standard External pilot spec. (R) Vacuum spec. (V) Port size Vacuum spec.

LJ1H

Nil Standard motor SMC controller Series LC1 compatible L R Left Right Lead screw lead G R Y Matsushita Electric Industrial Co., Ltd.

Rotary Actuator

R o t a ti o n R e r g o a n t n a a g ti r o e n n o r ti a a n t o g R e Symbol: C40 Symbol: C41 Symbol: C42 The rotation range and the angle adjusting direction of the angle adjustable type are changed. The rotation range and the angle adjusting direction of the angle adjustable type are changed.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.