Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Industrial Filters

18 10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

Bag Filter

Element Hole for fluid release Basket Lock mechanism Lightweight 32% lighter than the current model Weight: 13 kg (Current model: 19 kg) Band Applies to FGF1A Piping operations are a breeze. With a removable leg system, carrying out piping operations at the fluid release port is easier.

Slider Type Ball Screw Drive/11-LEFS Series

(170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21 68 53.8 85.5 8 31 8 12.9 Vacuum port Rc1/8 M4 x 0.7 thread depth 8 (F.G. terminal) +0.030 0 6H9 ( ) depth 6 n x 6.6 7 76 150

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

If the rod cover on the other side is secured or tightened, the cover could rotate, leading to misalignment. 13 B

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

13 43 4 x M5 x 0.8 through (Thread for mounting attachment) When open G (mm) J 26 50 70 H 144 216 256 G 114 186 226 F 84 126 146 E 28 58 78 D 76 106 126 B C 45 75 95 A MHL2-16D MHL2-16D1 MHL2-16D2 112211221122114 168 208 40 70 90 929 Parallel Type Wide Opening Air Gripper MHL2 1122Dimensions MHL2-20D 11222 x 6.6 through (Hole for mounting body) A B C D 2 x M6 x 1 thread depth 7 (Mounting

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Magnetic Holding Force Unit: N 25 10 15 Bore size (mm) Magnetic holding force 363 53.9 137 8-16-13 13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23

For post-stoppage positioning and locking

M8 x 1.25 thread depth 13 (External cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this before handling the products.

RSH

MK/MK2 RSQ/RSG 0.2 l53 RSH l67 CE1 CE2 ML2B 4-6.6 Through hole 8-11 Counter bore depth 5 ML1C Load carrying direction REA 12 3 REC *28 13 *10.3 6 RHC 6 MTS 12 Conveyor lower limit position CC 1 *3 R25 73 87 Stroke 2-Rc(PT)1/8 20 16 8 160 16 Pressure port at rear side Pressure port at front side 23 6.5 14 2-Plug 46 51.5 (Diagonal 62) Basic type: RSH32-20ll SRSH32A, #1 (#1+#5) With locking

CQM

Data 7-5-13

Guide Table Series MGF ø40, ø63, ø100 1

For details, refer to page 8-30-32. 8-23-13

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Symbol Position detector arms Switch bracket Positioning angle For the applicable auto switch model, refer to the table below. a b c d 10 11 12 13 14 15 20 23 25 180 X X X X X Data X X X X X X X 90 b d X Table position detector arm X X X X X X X a X Switch mounting bracket X X Cylinder Unit/Applicable Auto Switch Load voltage Lead wire length (m) Auto switch model Electrical entry Wiring

CNS

Hs A D-A3/A44 D-A5/A6 10 10 10 17 17 17 D-A59W Ht D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 12 13 7 6 6 7 D-Y7BAL D-F59F/F5/J5 D-F5W/J59W D-F5BAL/F5NTL B 5 5 5.5 Proper Auto Switch Mounting Position/ Auto Switch Mounting Height D-G39/K39 11 11 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Magnetic Holding Force Unit: N 25 10 15 Bore size (mm) Magnetic holding force 363 53.9 137 8-16-13 13 Series CY1F Theoretical Output Weight Unit: kg Unit: N Piston area (mm2) Operating pressure [MPa] Standard adjustment bolt weight Weight of adjustment bolt for 25 mm adjustment Basic weight Model Bore size (mm) Additional weight per each 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 CY1F10 78 23

Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

Particle generation measurement test classify the 13/22-MXQ as grade 3, 4 which is determined by the type of adjuster option that is selected.  After inspection, the 13/22-MXQ is blown with high purity air (clean bench/class M3.5) in a clean environment.  It is then sealed and shipped in an anti-static double bag.

This is a legacy product, and replaced byVM830-01-01, VALVE MECH 1/8 PT, VALVE, VM (VFM/VZM) MECHANICAL VALVE, DA, VM BODY PT 1/8, .00000 lb

EXxx-OMQ0015CN

Content 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 Unit diagnostic status 1 7 6 5 4 3 2 1 0 Byte 3 Bit No.

Fieldbus system IO-Link Setting tool

How to Use the Software 13 8.1. The IO-Link Module setting screen 13 8.1.1. Search Master 13 8.1.2. Individual selection 14 8.2. IO-Link Module Setting Screen 15 8.3. Common Screen 15 8.4. Port Config Screen 16 8.4.1. Reading the IO-Link Port Setting 16 8.4.2. Changing the Settings of the IO-Link Ports (Only possible when not connected to PLC) 17 8.4.3.