Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

IZT40/41/42

Refer to the how to order above. 1 Only bar is ordered, 41 cannot be selected. 19

Air Cylinder Series CS1

B C D E EA F FA G J K KA M MM N P S (mm) 125 140 160 180 200 250 300 1 2 1 2 3 4 3 4 3 4 to 1000 50 47 145 115 36 90 59 43 14 16 15 31 27 35 98 M14 x 1.5 M30 x 1.5 Lube Non-lube Air-hydro to 1000 50 47 161 128 36 90 59 43 14 16 15 31 27 35 98 M14 x 1.5 M30 x 1.5 to 1200 56 53 182 144 40 90 59 43 14 18.5 17 36 30.5 39 106 M16 x 1.5 M36 x 1.5 to 1200 63 60 204 162 45 115 70 48 17 18.5 20 41

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

KA M D MM E EA F FA G J N P S (mm) 125 140 160 180 200 250 300 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 15 145 31 115 27 36 90 59 43 14 16 35 98 Lube Non-lube Air-hydro 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 161 15 31 128 36 27 90 59 43 14 16 35 98 3/4 Up to 1200 M16 x 1.5 M36 x 1.5 56 53 182 17 36 144 30.5 40 90 59 43 14 18.5 39 106 3/4 Up to 1200 M18 x 1.5 M40 x 1.5 63 60 20 204 162 41

A_HEC-OM-K001

ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Note) 2DH is entered in 101 digit is attached to temperature data. Host SOH UT ENQ 32H Check sum CR (H) (L) Chemical Thermo-con SOH UT STX 32H Internal sensor temp.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

51 63.5 B 52 62 70 86 106 NB 8h9 AC 3 3 3 4 5 NA 14 16 18 24 28 AA 44 47 55 66 82 AB 41 44 52 62 77 M 2 2 2 3 4 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

PF-OMN0009_C

) (PF3W511 ) (M54 ) 2 mm (41) -17No.PF-OMN0009CN-F (PF3W504/520/540 ) ,(3.0,4 ) 8 0.50.7 Nm (41) , , 4 (PF3W511/521 ,(4.0,4 ) 1.01.2 Nm (41) ,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC

Mechanically Jointed Rodless Cylinder Series MY1

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

3 Port Solenoid Valve SYJ300/500/700 Series

N.O. 24 VDC 12 VDC Type 41 Type 20 SYJ700 L type plug connector Non-locking push type With light and surge voltage suppressor N.C.

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

CG5-S

26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 100 100 to 1500 M26 x 1.5 40 37 41

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 I-G02SUS Y-G02SUS 20 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CJ5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25

Cylinder with Turntable Series MGT

Mass (g) D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Do not fix the auto switch with the existing screw installed on the auto switch body.

CLK1

36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27 1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Wear ring 4 20 36 Aluminum alloy Stainless steel Resin Guide tube Rod seal A Intermediate collar 5 21 37 Aluminum alloy Structural steel NBR Ring Rod seal B Lock ring 6 22 38 Aluminum alloy Tool steel NBR Pin A Rod seal C Brake spring 7 23 39 Steel wire Structural steel NBR Pin B Piston seal A Collar 8 24 40 Structural steel Aluminum alloy NBR Cover assembly Piston seal B Piston rod 9 25 41