Polyurethane Tubing TU/TIUB Series

(mm) 2 4 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 KF Tubing I.D. (mm) 1.2 2.5 4 5 6.5 8 10 2 3.18 4.23 6.35 8.46 Max.

FMW-4300-X5 .2 5 30 .3 .6 4A FMW-4300-X10 .5 10 30 .6 1.0 4A FMW-4300-X30 1.5 30 30 1.0 1.5 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 2, /: /, 2nd Nominal Nozzle Size: 2 (ø1.0), 2nd Selection Supply Valve and Release Valve: K (N.C./N.C.), 2nd Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 2nd Selection Quantity: 2

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 2 (Manual Override), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

AP500

21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

FMW-4300-X5 .2 5 30 .3 .6 4A FMW-4300-X10 .5 10 30 .6 1.0 4A FMW-4300-X30 1.5 30 30 1.0 1.5 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4300-X5 .2 5 30 .3 .6 4A FMW-4300-X10 .5 10 30 .6 1.0 4A FMW-4300-X30 1.5 30 30 1.0 1.5 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4300-X5 .2 5 30 .3 .6 4A FMW-4300-X10 .5 10 30 .6 1.0 4A FMW-4300-X30 1.5 30 30 1.0 1.5 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

FMW-4300-X5 .2 5 30 .3 .6 4A FMW-4300-X10 .5 10 30 .6 1.0 4A FMW-4300-X30 1.5 30 30 1.0 1.5 4A 1 Wetted materials. 2 For special deadband or current requirements, contact factory.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36

Series SYJA300 3 Port Air Operated Valve

Note) Model number for base mounted style without sub-plate is SYJA5 2 and SYJA7 2. 1 2 1 2 Body ported Series SYJA500 With Bracket Model No. of air operated valve SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not assembled.

VZA200/400

1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating pressure Pilot pressure Note) Impact resistance: No malfunction from