Multi-channel Digital Sensor Monitor

Remarks Power supply/output cable ZS-26-L Length 2 m Connector for sensor lead wire ZS-28-C 1 pc.

PA300/500/700

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts Description Body Adapter plate End plate Retainer Spool valve Piston Spring Sub-plate Note Platinum silver Platinum silver Platinum silver No. q w e r t y u i Material Aluminium die-casted Aluminium

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

High Purity Fluoropolymer Needle Valve Series LVN 1

PB Tightening torque for piping Torque (N.m) Body class 1.5 to 2.0 2 3.0 to 3.5 3 7.5 to 9 4 17-5-133 3 Series LVN Flow Characteristics (Fluid: Water) LVN20 LVN30 LVN40 14 4 4.5 7 8 12 3.5 Differential pressure Differential pressure Differential pressure 6 10 P0.05MPa P0.05MPa P0.05MPa 3 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) 5 8 P0.03MPa P0.03MPa 2.5 4 P0.03MPa 2 6 3 1.5 4

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Table of Contents - Tubing

How to Use Caution q The multiple tube holder can be cut apart according to the number of tube to be connected.

RSQ

MK(2) Rod end configuration Configuration Rounde bar type Chamfered type Roller type Lever type (Non-adjustable) (3) Application Basic style With cancel cap With lock menchanism With lock & cancel Symbol Nil K R L B C D E Bore size RS Q G Piping 12 16 20 32 40 50 12 mm 16 mm 20 mm 32 mm 40 mm 50 mm Nil F Screw-in piping Built-in One-touch fittings (2) RS H A Note 2) Bore sizes available

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

Note 3) When specifying the negative common specifications of the L kit, suffix N to the kit symbol. 578

Heavy Duty Stopper Cylinder Series RSH/RS1H ø20, ø32 ø50, ø63, ø80 3

With cancel cap With lever detection switch Q Note 2) Direction of transfer Note 1) Options can be combined.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Electrical entry MO: M-type plug connector without connector M: M-type plug connector with lead wire L: L-type plug connector with lead wire G: Grommet (DC specification) LO: L-type plug connector without connector With light/ surge voltage suppressor With

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

Bracket VFS Electrical entry VFR G: Grommet (DC specification) L: L-type plug connector with lead wire LO: L-type plug connector without connector M: M-type plug connector with lead wire MO: M-type plug connector without connector Body type 2 Body ported VQ7 With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 21 (50 to 250 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 14 (1 1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

, CE-Compliant: Q (CE-Compliant)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket

Line Filter

AMX-OMZ0092 PRODUCT NAME Line Filter MODEL / Series / Product Number AFF50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AFF60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AFF50 10 6-2.

Mist Separator

AMX-OMZ0093 PRODUCT NAME Mist Separator MODEL / Series / Product Number AM50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AM60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AM50 10 6-2.

Micro Mist Separator

AMX-OMZ0094 PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AMD50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AMD60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1.

Pressure Relief 3 Port Valve with Locking Holes

Unit: N m Applicable models VHS20-D VHS30-D VHS40-D VHS40-06-D VHS50-D Max. moment (M) 14.5 16 19.5 35 45 Max. moment (M) = Length (L) x Load (F) Length (L) Load (F) 6. For piping into the exhaust port, recommended installing a silencer.