Square Tube Type Air Cylinder Series MB1

"n" pcs. Nil S 3 n Built-in magnet Mounting bracket Basic type Foot type Flange type B L F Type of auto switch Nil Without auto switch Select an applicable auto switch model from the table below.

Low Profile Guide Type

M3 M3E m x g FE L2 DFrom above, n = 1 + 2 + 3A + 3B = 0.1 + 0.082 + 0.35 + 0.28 = 0.812 From n = 0.812 1, it is applicable.

70astamb1

2 pcs. 1 pc. 3 pcs. n pcs.

LA-OMP0023

Fig. 4-2 Allowable load weight. 10 - LAT3-10 LAT3-20 6 6 Allowable pushing force [N] Allowable pushing force [N] [N] [N] 5 5 4 4 Ambient temperature Ambient temperature 3 3 5 20 40 5 20 40 2 2 1 1 0 0 0 20 40 60 80 100 0 20 40 60 80 100 Duty [%] Duty [%] LAT3-50 LAT3-30 6 3 Allowable pushing force [N] Allowable pushing force [N] [N] [N] 5 4 2 Ambient temperature Ambient temperature 3

Standard Combinations

Note 4) Separate spacers are required for modular unit. 7 Series ACG20A/30A/40A Dimensions ACG20A N A E G P L C B C H2 H1 OUT IN SMC 2-L J OUT B M 2-K Port size O S O S Min. clearance for maintenance Drain D D Filter regulator Lubricator ACG30A/40A N A E P G L H2 H1 OUT IN SMC OUT L M K Port size Min. clearance for maintenance Drain Filter regulator Lubricator Metal bowl with level gauge

Single Axis Electric Actuator Series LJ1H

Top Bottom 1 2 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.2 200 6.0 300 6.8 400 7.5 500 8.3 5 to 40 (with no condensation) 10 74 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

PA300/500/700

Model Manifold base model R port model Common Individual Port size Applicable valve model Series VV3PA3-411-02 n VV3PA3-423-02 n VV3PA5-411-03 n VV3PA5-423-03 n VV3PA7-411-04 n VV3PA7-423-04 n Rc Rc Rc Rc Rc Rc 1 4 1 4 3 8 3 8 1 2 1 2 VPA300 VPA344 VPA500 Common Individual VPA544 VPA700 Common Individual VPA744 Option Description Part no.

Refrigerated Air Dryer

M K L Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size 3/8 8.9 [226] 16.1 [410] 18.6 [473] 2.6 [67] 4.9 [125] 12.0 [304] 1.3 [33] 2.9 [73] 1.2 [31] 1.4 [36] 6.1 [154] 0.8 [21] 13.0 [330] 0.6 [15] IDFB3E IDFB4E to IDFB11E B Q A D E Compressed air inlet Illuminated switch Compressed air outlet Evaporation thermometer G F J Ventilation

VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

3 Port Solenoid Valve Series SYJ300/500/700

fitting) 33.1 12 + + + + + Approx. 300 (Lead wire length) 30.7 (Light/surge voltage suppressor) 11.4 17.5 35.9 L1 L2 4 Manual override (4.4) 12 1/8 (P, R port) 8.5 2-4.5 (For mounting) 52.9 [55.1] P R P R 17.5 11.5 36 20.5 (Station 1) (Station n) (Pitch) P=10.5 15.5 1/8 (P, R port) 8.5 48.5 [55.5] (Station 1) (Station n) 48.5 [55.5] 20 A A 5 (Pitch) P=10.5 15.5 One-touch fitting (A port)

Actuator Position Sensor

(12) 0 R/W Device Access Lock Y Refer to device access lock (P.19) 0x000C 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com 0x0012 (18) 0 R Product Name N Example: D-MP025A 0x0013 (19) 0 R Product ID N Example: D-MP025A 0x0014 (20) 0 R Product Text N Actuator Position Sensor (21) 0 R Serial Number N 8 octets fixed character string 0x0015 (22) 0

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

of the items below, where the total (n) does not exceed 1.

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

VCL

W (44) T R (Y) Z VC T 25 VDW IN port 2-3/8 : Thread type l=280 l=300 VQ VX2 (X) (V) S Q 2.5 (N) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-

VCS

VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E C D G VX3 Q SMC SMC C A B VXA 16 L1 L2 L3 VN LVC 1 Stations D side U side 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 LQ H H P = J 2 N-1/4 N-1/8 : Thread type LVN (pitch) TI/ TIL L Dimension (mm) PA n (stations) Model Dimensions

Series VCL

E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5 196.5 300 369 L1 77 115.5 154 231 346.5 269.5 192.5 308 385 VV2CL3

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

ZQ

L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Compact Vacuum Ejector Series ZQ

L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.