ITV

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 900 kPa 900 Output deviation factor (% F .S.) 800 kPa IR 800 0.5 700 kPa Set pressure (kPa) 700 600 kPa VEX 600 Out 500 kPa 500 0 400 kPa AMR 400 Return 300 kPa 300 0.5 ITV 200 kPa 200 100 kPa 100 50 kPa IC 0.4 0.6 0.8 1.0 1 0 1 2 3 4 5 6 0 7 1.2 Flow

SY

0 0 100 200 0 100 200 300 400 500 600 700 0 50 100 150 200 250 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 238 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Slovenia d.o.o.

Vacuum System Peripherals:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact 3 port solenoid valve Series SY100, SYJ Compact size: 10 mm (SY100, SYJ300) 15 mm (SYJ500) 18 mm (SYJ700) Low power consumption: 0.5 W ZL SY100 Vol. 4 0.14 M3 x 0.5 M5 x 0.8 , ZY 1 8 1 4 SYJ300/500/700 Vol. 4 0.41 to 2.8 ZQ 3 port solenoid valve

VCA

S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

MXS

MX Model Allowable kinetic energy 1.0 End plate mounting Rubber bumper 0.018 0.027 0.055 0.11 0.16 0.24 Shock absorber Allowable static load coeficient: MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 MXU 0.7 0.045 0.11 0.22 0.32 0.48 0.5 W MXS 0.4 K=0.6 MXQ 0.3 MXF 0.2 Max. allowable static load: Wmax (kg) Table 2 Correction value for moment center distance An (mm) Table 3 MXW 50 100 200 300 500 700

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 24 LPM , 24 LPM, Max Pressure: 7.2 PSIG / 496 mbar , 7.2 PSIG / 496 mbar, Max Vacuum: 20.7 in HgV / -700 mbar , 20.7 in HgV / -700 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 7.64 in / 194 mm Width: 3.82 in / 97 mm Height: 1.89 in / 48 mm , Length: 7.64

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 250mm, Motor: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 350mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting:

Size: 40, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 300mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: F (Rod Flange), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 600mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: C

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 150mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: C

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3 (3m), Controller Type: C

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 200mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: G (Head Flange), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller

Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32, 8), Stroke: 50mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 8 (Rail Mounting