11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x

CJP

7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29

MRHQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 37h9 +2.2 0 15.2 opened MHS 0 -0.1 4 31 4-M2.5 x 0.45 (attachment mounting screw ) 0 -0.1 5 0 -0.7 11.2 closed M5 x 0.8 Finger closing port MHC 3 Max. 6.1 MHT 5.7 13.7 12 4-M4 x 0.7 depth 6 MHY (two on the other side) 34 M5 x 0.8 Finger opening

TCU

Tube size (mm) Dimension of coil (mm) No. of tubes Max. operating length (m) L D Part No. 210 18 1 52 2 35 3 22 1 54 2 27 3 17 1 41 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1.5 4 2.5 280 28 265 1 2 5 tubes/ case 1.5 1 2 325 24 6 4 37 305 330 31 8 5 Dimensions are changeable due to material.

CYPSeries

NBR O-ring 15: Electroless nickel plated, 32: Chromated 3 Piston Brass/Aluminum alloy 26 NBR O-ring 4 27 Carbon steel Piston seal Steel ball NBR 5 28 Polyurethane Wear ring A Bumper Special resin 6 29 Nickel plated Chrome molybdenum steel Wear ring Hexagon socket head set screw Special resin 7 30 Nickel plated Chrome molybdenum steel Shaft Hexagon socket head cap screw Stainless steel 8 31

CYPSeries

NBR O-ring 15: Electroless nickel plated, 32: Chromated 3 Piston Brass/Aluminum alloy 26 NBR O-ring 4 27 Carbon steel Piston seal Steel ball NBR 5 28 Polyurethane Wear ring A Bumper Special resin 6 29 Nickel plated Chrome molybdenum steel Wear ring Hexagon socket head set screw Special resin 7 30 Nickel plated Chrome molybdenum steel Shaft Hexagon socket head cap screw Stainless steel 8 31

V100

Blank Plate Assembly Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Gasket Assembly Part no.: V100-31-1A Part no.: V100-77-1A (M2 x 14, flat nickel plated) Round head combination screw Place notch mark on the blank plate to 2 port side when assembling.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5031

Air Cylinder MGQ Series Compact Guide Cylinder

. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51 o.43 0.35 o.31 o.27 MGaL 0.73 o.58 o.48 o.71 0.64 2 0 . .

Air Cylinder CLA Series Fine Lock Model

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

Scale Cylinder & Counter Series CE

Scale Cylinder & Counter SeriesCE Series CEU Series CEP1 CEP1/CEU5 Resolution: 0.01mm (accuracy 0.02mm) External output function: RS-232C BCD Multipoint output: 5 points (20 points with bank switching) 31 points (binary output) High Precision Scale Cylinder/ Series CEP1 Multi Counter/Series CEU5 Upgraded Scale Cylinder/Series CE1 Achieve rationalizatio A scale cylinder wit Measurement is

Series MXP Precision Air Slide Table

B Reverse the mounting direction A Reed switch D-A90(V), D-A93(V), D-A96(A) mm Auto switch mounting Switch operating range Stroke (mm) 20 45 25 51 31 Type 25 50.5 30.5 30 59 39 10 35 15 40.5 20.5 Caution A B A B A B MXP10 Tool for auto switch mounting MXP12 5 Use the screwdriver with grip diameter 5 to 6 mm when set screw (attached to auto switch) is set.

3 Position Cylinder Series RZQ

43 27 39 50 46 47 35.5 43 36.5 48.5 32.5 41.5 38 44.5 31 44 34 33.5 29.5 40 63 49 40 50 39 46 41.5 51.5 36 44.5 37.5 47.5 34.5 47 37 33 43 D-A7H,A80H D-F7,D-F7F D-J79,J79W D-F7W D-F7BAL D-F7NTL D-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-F9V D-F9WV D-A7,A80 Bore size (mm) U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Display (PF2D30/31) 40 Sensort 15 Brown 6 2 Analog output Switch output or Pluse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24VDC White 7 3 Black A 62 52 42 5 1 Blue Model A PF2D5--1 PF2D520 12.7 PF2D504 4-4.5 9.52 Display (PF2D30/31) Sensor Brown 52 1 2 6 Analog output Switch output or Pluse output 4 8 Load + 12 to 24VDC White 3 7 Black 1 5 Blue 18 PF2D5

Pneumatic Transfer System Series MF

Description Qty. 1 Description Track Guide spacer Eccentric bearing holder Adjustment gear Snap ring Detent fitting No. 1 No. 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 Aluminum alloy Spring steel Special resin Stainless steel Stainless steel Stainless steel Stainless steel Hard anodized 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 2 2 2 2 4 2 2 2 8 4 Cylinder

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Port P Port R Port R Model A side B side JIS symbol 4(A) 2(B) N.C. valve N.C. valve SZ3A60 3(R) SOL.b SOL.a 5(R) 1(P) Size and weight reduced by eliminating the manifold base 4(A) 2(B) N.O. valve N.O. valve SZ3B60 SOL.b SOL.a 5(R) 3(R) 1(P) 4(A) 2(B) N.C. valve N.O. valve SZ3C60 SZ3000 Series SOL.b SOL.a 3(R) 5(R) 1(P) Height 31% reduction External pilot specifications are not available

Compact Vacuum Ejector Series ZQ

VQ1 1 0 5 L Vacuum pressure switch ZQ1S D AS 31 C Solenoid valve VQ1 ZQ1 2 0 5 L Electrical entry Switch specifications Actuation Connector type 31 32 51 52 1 NPN output and analog output 2 NPN outputs 1 PNP output and analog output 2 PNP outputs 2 Normally open C Lead wire length: 0.6 m Connector type Pilot valve CL Lead wire length: 3 m Nil Standard type (1W) CN Without connector Rated

AC Servo Motor Driver (MECHATROLINK-III type)

Trial Operation (SigmaWin+) . 27 5.1 Communications setting for PC . 27 5.2 JOG Operation . 29 5.3 Program JOG Operation . 31 6. The recommended the parameter for each actuator . 34 6.1 The recommended value of the parameter [LEF] . 34 6.2 The recommended value of the parameter [LEJ] . 35 6.3 The recommended value of the parameter [LEY] . 36 7.

SFOD-OMT0012

Parameter setting . 28 (1) Exclusive parameter setting for the connected actuator . 28 (2) Change of controller and actuator settings . 31 (3) Change of the parameter protect setting . 32 4.3 Step data setting . 33 (1) Step data setting . 33 (2) Saving or Loading the Step data . 35 4.4 Monitor function . 36 4.5 Teaching . 36 4.6 Test Drive . 39 (1) Test Drive . 39 (2) JOG, Inching, and Return