Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

A-HEC-OM-J004

MODE FUNC 5.4 Operation of Controller 5-12 A_HEC-OM-J004-4 Chapter 5 Operation [Tips] PV Indicator for unavailable change If a change in a parameter in the control mode (refer to page 5-12, 5.4.9 Details of Control Setting Mode) is attempted when 2 (RUN/READY setting) is selected, the indicator as shown on the left appears to show that the change is not available.

ZL3-OM00601

Do not pull the handle with excessive force. 4) The retaining mechanism works when the vacuum release flow adjustment needle makes 12 revolutions from the completely closed state, and it is not possible to turn any more. The needle may break if it is rotated more than 12 revolutions. 5) Do not use tools such as pliers to tighten the handle.

BAR STOCK MANIFOLD, 4/5 PORT SOLENOID VALVE, I94, 100.00000 lb

ZL3-OM00801

-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5) 6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [

Digital Pressure Switch

Check that the power supply voltage is within the range of 12 to 24 VDC 10%. Supply the correct voltage of 12 to 24 VDC 10%. Incorrect power supply Power saving mode Check if the power saving mode is selected. Reset the function settings. Indicator turns off. 9 Check the power supply wiring.

PSxx-OMU0008CN

ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) F.S. ( 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] R.D.

VZM400

-01-06 VZM450-01-06S Toggle lever VZM450-01-08 VZM450-01-30R VM-30CR Red VM-30CB Black VZM450-01-30B Push button (Mushroom) VM-30CG Green VZM450-01-30G VM-30CY Yellow VZM450-01-30Y VZM450-01-32R VM-32CR Red VM-32CB Black VZM450-01-32B Push button (Extended) VM-32CG Green VZM450-01-32G VM-32CY Yellow VZM450-01-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VZM450-01

PF-OMN0011_C

SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

Lubrication Equipment

Burst pressure 25 20C to 60C Nylon 12 Min. bending radius (mm)(1) Operating temperature Material Note 1) The value at temp. of 20C and with O.D. variable rate 10% max.

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

1 to 12 stations (24) LD0 LD1 LD2 Lead wire (25 cores) 0.6 m lead wire Lead wire (25 cores) 1.5 m lead wire Lead wire (25 cores) 3.0 m lead wire 1 to 12 stations (24) TD0 Terminal block box 1 to 10 stations (20) The maximum number of stations displayed in parentheses is applied to the special wiring specifications.

AWM20 to AWM40

) Note 12) Note 12) i ZA Note 11) Pressure unit Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) Digital pressure switch: With unit switching function Note 13) Note 13) Note 13) Note 10) For thread type: NPT.

AWM20 to AWM40

) Note 12) Note 12) i ZA Note 11) Pressure unit Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) Digital pressure switch: With unit switching function Note 13) Note 13) Note 13) Note 10) For thread type: NPT.

PSxx-OMS0004CN

0.2F.S.(25 IP65 AC500V 1 100M(DC500 V) -1060 -2070 () 3585RH() CERoHS 01 02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1

AS-X785

sealant (for R) * R thread type: With sealant G thread type: Without sealant Port size Cylinder side 04 1/2 Valve side Valve side applicable tubing O.D.*1 10 10 12 12 With One-touch fitting Cylinder side *1 For selecting applicable tubing O.D., refer to the cover page. 2 201 S 01 F 06 X785 AS Pilot port Thread type Seal method Body size 2 1/8, 1/4 3 3/8 Nil R G G Nil Without sealant (for

•

r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"O12-24'/OC + '3 I 'liMe iAoa'Cg oUlpUl) + 1 2-2~VCC 12-24VOC ~ F='-'-F===""--, I I LE OIAUI I BIeC!

KQ2-G

Symbol Size 04 4 06 6 08 8 10 10 12 12 16 16 3

Vacuum Ejector Series ZM

Description 7 8 9 10 11 12 Material Polyethylene Part no.

TA301

A port size Symbol Port size Exhaust style Individual exhaust Common exhaust 01 1 8 VVTA300-051-01 1 pc. VOA301 4 pcs. DXT060-51-13A1 pc. Manifold bases same as those for Series VVT300 manifold valves are available.