AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

SMC Pneumatic Clean Series

AL MM NA FX GB 22 22 GA ZZ S P N F D A B1 NB 32-0.039 0 7 5.5 5.5 5 K I GC 34 31 31 27 H1 H FF 46.5 37.5 33.5 28 Bore size 138 109 107 103 1/8 36.4 42.4 52.4 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 8 8 40 32 25 20 15 15 6 6 5 17 17 13 6 6 42.5 34.5 30 24 24 22 22 18 37.5 29 29 29 21 19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Air Preparation Equipment

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

MY2

4 #1@3@9 !5@8 @7 %5!

Rotary Actuator

5 !4 !1 !1 y u i Component Parts Description Material Description Material No. No.

CRBU

Applicable shaft type: K (mm) L3 max W1 L1 max X (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size L3 = W1 = L1 = 10 10 0.5 to 2 Y 1 L2 1 L1 1 0.5 to 2 X 3 4.5 to 14 6.5 to 14 L4 = 15 15 Y = Y 1.5 L2 1 L1 1 0.5 to 2.5 X 4 0.5 to 2.5 8 to 18 L2 = 5.5 to 18 20 20 Y 1.5 L2 1 L1 1 0.5 to 3 X 4.5 0.5 to 3 9 to 20 6 to 20 X = 30 30 Y 2 L2 2 L1 2 0.5 to 4 X 5 0.5

Vacuum Module Series ZX

(VJA314) ZX1-VJA3 4 1 2 Z L 4 2 5 ZX1-VJ3 1 ZX1-VJ114K1, J1 AMV Manual override Type of actuation ZX1-VJ3 4 1 2 2 K3, J2 AEP N.C. (Normally closed) N.O.

Fieldbus system PROFINET compatible SI Unit

, 1: Module 4 has an error 4 Module 5 error 0: No error or not connected, 1: Module 5 has an error 5 Module 6 error 0: No error or not connected, 1: Module 6 has an error 6 Module 7 error 0: No error or not connected, 1: Module 7 has an error 7 Module 8 error 0: No error or not connected, 1: Module 8 has an error Valve diagnostics 1 Table. 5-4 Valve diagnostics 1 Bit Description Explanation

Step Motor Controller (Servo / 24 VDC)

number and the combination of IN0-IN5 or OUT0-OUT5. 0 OFF 1 ON 0 OFF 1 ON No IN5 IN4 IN3 IN2 IN1 IN0 Step Step OUT OUT OUT OUT OUT OUT No 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 0 0 0 1 2 0 0 0 0 1 0 2 0 0 0 0 1 0 3 0 0 0 0 1 1 3 0 0 0 0 1 1 4 0 0 0 1 0 0 4 0 0 0 1 0 0 5 0 0 0 1 0 1 5 0 0 0 1 0 1 6 0 0 0 1 1 0 6 0 0 0 1 1 0 7 0 0 0 1 1 1 7 0 0 0 1 1 1 8 0 0 1 0 0 0 8

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

A_HEC-OM-I009

-2 Fig. 4-4 Electrical diagram -4-3 Fig. 4-5 Circulating fluid circuit -4-3 Fig. 5-1 HEC002-A -5-1 Fig. 5-2 HEC006-A -5-1 Fig. 5-3 Air Filter -5-2 Fig. 5-4 Top view -5-2 Fig. 5-5 Operation panel-5-3 Fig. 5-6 Display -5-3 Fig. 5-7 Reservoir Cap -5-4 Fig. 6-1 Cooling capacity -6-2 Fig. 6-2 Heating capacity -6-2 Fig. 6-3 Pump capacity -6-3 Fig. 9-1 Alarm indication in the event ERR14 arises

LJ1H

1 !9 !5 !5 i q A A !2 @1 @0 !4 u Section AA Parts list Material Note No. Description No.

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

VZ5000

12 00F 12 stations 00N NPTF 00T 1(P) port Rc 1/4 3/5(R) port Rc 1/4 For How to order applicable connector assemblies, refer to page 3-3-7.

SFOD-OMT0005CN

2) LEC-T1-3G *1 *2 http://www.smcworld.com/ 5(P.23) 16(P.68) USB LAN -8- 2.4 () (1) (JXC-CPW) (JXC91-) 1 (JXC-CPW) 1 *1 1 *1 [] (:LEC-T1-3G) (LEC-W2) (USB ) (: P5062-5) (2) 3.4 (P.16) (3) 4.1 (IP )(P.18) (4)PLC PLC (5) 5.

3 Port Air Operated Valve Series SYJA300

bracket F Nil Without bracket SYJA 2 5 1 M5 Body ported Thread type Nil Rc G NPT NPTF SYJA 4 5 1 F N T Base mounted Port size Series Type of actuation Symbol Without sub-plate Nil Bore size Applicable series SYJA700 SYJA500 7 5 Normally open Normally closed 2 1 1/8 with sub-plate 01 SYJA500 SYJA700 1/4 with sub-plate SYJA700 02 How to Order Manifold Base Same manifolds as series SYJ500/700

Clamp Cylinder with Lock

9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

ZP

2.5) a b c d e Y Model 13.5 5 1.8 14.5 5 1.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 Model A B C D E Y F ZPY2004U 2 4 2.6 4.6 1.2 0.3 25 5 F 6 F U6 (Soft tube 6/4) U6 (Soft tube 6/4) 15.5 7 2.5 16.5 7 2.5 8 28 20 30 48 10 ZPY25D ZPY3507U 3.5 7 4.3 7.8 1.8 0.5 ZPY4010U 4 10 5 11 2 0.8 C Y A B Model ZPY10UT 10 11 1 ZPY13UT 13 14 1.5 ZPY16UT 16 17 2.5 ZPY10CT 10 11 0.8 ZPY13CT 13 14 1 ZPY16CT 16