MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

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Electro-Pneumatic Positioner

Consequently, (7) the exhaust valve of (1) the pilot valve moves to the right, the output pressure of OUT1 increases and (15) the diaphragm moves downwards.

reduces flow setting time

7 !5 r !8 !4 !6 !7 !5 !1 AS-F AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.

Manifold Specifications

Flat Ribbon Cable Type 21P Applicable solenoid valve How to Order 1 3 5 6 4(A), 2(B) port Stations VV4Z1 05 21P VZ1120MOZ-M5 Applicable blanking plate assembly DXT170-25-3A Applicable connector assembly DXT170-127-A 1: 100 VAC, 3: 110 VAC, 4: DC P, R port thread type 03 3 stations 3(R) port Nil Rc G NPT 12 00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector

Series M Miniature Fittings M3, R(PT) 1/8, M5

female. 4/2.5 4/2.5 1 8 1 8 Rc(PT) -M5 female M-5B For nylon tube.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

7 !5 r !8 !4 !6 !7 !5 !1 AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG AS-FG !9 AS-FP Meter-out type Meter-out type Meter-in type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-out type Meter-in type Component Parts No.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Digital Flow Switch Series PFA For Air Series PFW For Water

View A PFA3-B DIN rail type Sensor Blue Brown Black Analog output 1 2 3 4 3 x 7.2 (= 21.6) 8-M3 36 15 6.4 2 3.4 5 6 7 8 OUT1 N.C. Load Load 2 1 3 4 6.5 12 to 24VDC + 26 SMC FLOW SWITCH PFA312-(-M) 35.5 30 15.2 56 (4.5) 44 UNIT RESET SET Sensor Blue Brown Black Analog output 1 2 3 4 5 6 7 8 5 6 7 8 29 OUT1 N.C.

MHL2

Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38 54 72 24 39 57 100 142 180 76 118 156 56 78 96 26 42 60 51 67 85 36 52 70 Note 1) J dimension is at fully closed.

CE2

1 !2 !3 !4 !5 !6 !7 !8 !

VP3145/3165/3185

2 (20A) 3 4 (25A) 1 VQZ 04 06 10 12 14 20 VZ Option (32A) 1 4 1 (40A) 1 2 1 Coil rated voltage VS 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz JIS Symbol Internal pilot (50A) 2 VFN 4 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option How to Order Pilot Valve Assembly External pilot 00 VT3113 G 1 Coil rated voltage Electrical entry 1 2 3 100

EXxx-OMV0018_ENG

Please keep this manual handy for future reference. 2 RD+ Receive Data + 1 3 3 TDTransmit Data Bit No. 6 4 6 4 2 0 0 0 RDReceive Data 4 0 2 4 6 8 16 28 30 Output No. Solenoid on side A 2 Side D BUS IN: M12 4-pin socket D-coded (SPEEDCON) (SI unit side) 1 Output No. Solenoid on side B 1 3 5 7 9 17 29 31 No. Designation Description 1 3 5 7 1 1 5 7 Bit No.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

PSxx-OMU0002CN

MPa Md1Md2 / 3 (3 ) [-] -45No.PS-OMU0002CN-D ON ON () ON () / (o ) P_1(n_1)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -46No.PS-OMU0002CN-D () [F82] OFF -47No.PS-OMU0002CN-D [F11] <> [F11] 1000 100 [F11] , [MPa]/[kPa(ZSE20A(F))]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg]:) 30[F 0] -48No.PS-OMU0002CN-D [F80] 30 <> [F80] [F80] 30 ()

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

1 !2 !3 !4 !7 !

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.