2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12 14
. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1
Color Refer to the burst pressure characteristics curve. 20 to 60C (-4 to 140F) Polyurethane Black 1in = 25.4mm Polyurethane Flat Tubing Series10-TFU Specifications Model 10-TFU 10-TFU 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 4 6 4 8 5 2.5 Air Maximum operating
Color Refer to the burst pressure characteristics curve. 20 to 60C (-4 to 140F) Polyurethane Black 1in = 25.4mm Polyurethane Flat Tubing Series10-TFU Specifications Model 10-TFU 10-TFU 10-TCU 10-TFU 10-TFU 10-TCU 0425B-2 0425B-3 0604B-2 0604B-3 0805B-2 0805B-3 3 cores 2 cores 3 cores 2 cores 3 cores Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 4 6 4 8 5 2.5 Air Maximum operating
3/8 1/2 3/4 Orifice size (mm) LVA10 Series LVA 2 Note 1) LVA20 4 PFA LVA30 8 PPS LVA40 12 SUS316 LVA50 20 Integral fitting type/Series LVC (basic type) Series LVC : Body material SUS316 only Tubing size Metric sizes Inch sizes 4 6 8 10 12 19 1/8 3/16 1/4 3/8 1/2 3/4 Orifice size (mm) Series Body material LVC20 4 LVC30 8 PFA LVC40 10 LVC50 16 Clean Regulator Series SR Series SRH Contamination
For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (
Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 (-) A-3 (8) (1) (2) (B1) A1 (14.2) 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5 (3) B1 A1 2 1 (B3) (A3) (5.7) (4) 15 16 L (11) (30.7) 15.4 ()[820m] (1) (2) LECPB A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 8 8m * COM-A/COM B-3 3 A 10m * COM-B/ A-3 4 (3) B 15m * Shield
4 10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.
Circulating uid outlet, Circulating uid return port Rc3/4 NPT3/4 or G3/4 Overow port Rc1 NPT1 or G1 Automatic uid ll port Rc1/2 NPT1/2 or G1/2 Facility water inlet, Facility water outlet Rc3/4 NPT3/4 or G3/4 (for HRS-EP029 or HRS-EP030) (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.) Part no.
A B C E 141 120 85 1/2 725 410 IDU6D IDF6D 165 445 165 141 915 IDU-BP6C IDF-BP6C 1/2 141 3/4 120 85 755 410 196 IDU8D IDF8D 445 196 141 1045 IDU-BP8C IDF-BP8C 3/4 152 3/4 1 131 91 815 405 IDU11C IDF11C 196 445 196 1155 152 IDU-BP11C IDF-BP11C 3/4 1 175 131 91 890 405 222 IDU15C IDF15C 445 222 175 1230 IDU-BP15C IDF-BP15C 1 1 183 91 70 970 405 IDU22C1 IDF22C1 222 445 222 1445 71 IDU-BP22C
2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-4 . 6-3 6-5 . 6-5 7 C 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 M 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-
8.5 10.3 8 X W1 L1 max L3 max Size 30 50 63 80 100 CRQ2 6.8 8.5 10.3 8 11 X 2 X 2.5 X 2.5 X 3 X 4 8.5 to 25 12.5 to 36 13.5 to 41 16.5 to 50 21 to 60 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L1 2 L1 2 L1 2 L1 3 L1 4 6.8 8.5 10.3 8 11 MSQ MRQ Symbol: A46 Note) Except flange style The short shaft can be further shortened by machining a middle-cut chamfer into it.
Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8 8.5 10.3 8 X W1 L1 max L3 max Size 30 50 63 80 100 CRQ2 6.8 8.5 10.3 8 11 X 2 X 2.5 X 2.5 X 3 X 4 8.5 to 25 12.5 to 36 13.5 to 41 16.5 to 50 21 to 60 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L1 2 L1 2 L1 2 L1 3 L1 4 6.8 8.5 10.3 8 11 MSQ
Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.
-/221 3 1 2 2 CXS 3, 4 Note) Grade is different depending on the type of the ball bearing.
outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid
VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy
2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2
piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147
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