Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: None, Types of Screw

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm)

Body Size: 1/8, 1/4, Control Type: Meter-out, Thread Type: R, Port Size: 1/4, Applicable Tubing O.D.: ø8, Seal Method: -, Option: -, Lock Nut Option: -

Stations: 2 Stations, DIN Rail Length: 8 Stations

Body Size: 1/8, 1/4 Basis, Control Method: Meter In, Material: Brass (Electroless Nickel Plating), Port Size: 1/4, Applicable Tube OD: Ø8, Lock Nut: -

Body Option: External Pilot, Port Size: Rc1/4, Style: Toggle Lever, Suffix: -, Accessory: -

Nozzle Diameter: ø1.3mm, Vacuum Pressure: -48 kPa, SUP: One-touch Fitting ø8, VAC: Screw-in Rc 1/4

Nozzle Diameter: ø1.3mm, Vacuum Pressure: -89 kPa, SUP: One-touch Fitting ø8, VAC: Screw-in Rc 1/4

Size: 1/8, 1/4 Basis, Style: Elbow, Control Method: Meter-out, Thread: M3, M5, U10/32, Rc, Port Size: 1/4, Tube Size: Ø8, Option: -, Lock Nut: -

Size: 1/8, 1/4 Basis, Style: Elbow, Control Method: Meter-in, Thread: M3, M5, U10/32, Rc, Port Size: 1/4, Tube Size: Ø8, Option: -, Lock Nut: -

A_HEC-OM-J017

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR 4-2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 /min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 F.R.L.

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

Table of Contents

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

Clean Regulator

Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series. 0 to 0.2 G46-2-02-SRB G46-4-02-SRA 0 to 0.4 G46-4-02-SRB MPa G46-7-02-SRA Caution Selection 0 to 0.7 G46-7-02-SRB G46-10-02-SRA 0 to 1.0 1) Avoid use in locations with strong pressure pulsation or vibration.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,