Stations: 05 (5 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

NCA1

piston rod L S R X D Note: Tie rod length varies by mounting style.

Stations: 03 (3 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

e-Rodless Actuator

L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Reed switch: None Solid state switch: Manufactured upon receipt of order as standard. Note 2) To designate solid state switches with flexible specifications, add -61 after the lead wire length. Oil resistant flexible cab-tire cord is used for D-M9 as standard.

Stations: 5 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/Flow Adj.

Stations: 10 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/Flow Adj.

VCB

y Return spring Stainless steel CAC406 u Body Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

NVKF

2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198) (2r7) (2361 10.04 (25s) 10.79 1274't 11.54 12.28 (293) (312) 13.03 (331) 13.78 14.53 {3s0) L (369) 15.24 $mhs lllUlff 300 0l|||m$io Base Mounted (Side Ported) lType 42 Manifold NVV3KF3-42-Stations-01 T inch (mm) L: Dimensions Base Mounted (Side Ported) lType 542 Manifold NVV3KF3-S42-Stations

Series IDG

min (ANR) (SCFM) Note 2) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM) Note 3) Bracket assembly (accessory) part nos.

CUJ

Auto switch Cylinder B Cylinder A CUJ cylinder Auto switch Magnetic substance Non-magnetic spacer of 2.5mm or more Without shielding plate d 10 L 6 8 Bore L d 19 6 19 6 19.5 6 The space can be reduced by attaching shielding plates (steel plates 0.2 to 0.3mm thick) to the sides of the cylinders facing each other.

°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

°C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Certificate: w/Calibration Certificate, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min