Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10 2 Speed Controller with One-touch Fittings In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5
Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.
Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-
Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric 4, 6 6 8, 10 6, 8 1/4" 5/16" 3/8" 1/8" 5/32" 3/16" 1/4" Tube O.D. 1/4" 5/16" 3/8" 3/8" Inch 500 600 700 1200 1300 175 295 350 75 Air flow (l/min(ANR)) Controlled (free)/Flow 7.6 9.1 10.7 18.3 19.8 1.1 2.7 4.5 Eff. area (mm2) 5.3 Note 1) Max. operating pressure: 0.5MPa, Temperature: 20C 4.1-13
11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6
A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5 1.9/1.8 2.2/2.2 3.4 4.0 3.3/3.5 3.8/3.6 0.31 0.26 0.86 0.99 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13
For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.
Slrcke = 0.79 (20mm) with Bool Millmelersrn Pareh$eses 7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS REPAIR KITS SINGLE CLEVIS aoaE d,E L1 dNo NX 2.36 t-05 2 . 9 1 1.06 1 . 1 0 M 1 8 x 1 . 50.61 4.79 \20) 02 +0.070) (,27) (60) (28) \74) 115.5) 047 + 0.003 I 1 o 2.36 0.79 r.05 2.91 1.06 M 1 8 x l . 5 0 6 i (r2 +0.070) (16 "') (28) (60) (15.5) 120) \211 (13+0.070) 1 1 0 ; f f (28 ;)
M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.
(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].
1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.
For details, refer to LECYM Operation Manual,section 3.3.2. 13 - 2.3.2 Sequence Input Circuit (1) Photocoupler Input Circuit CN1 connector terminals 6 to 13 are explained below. The sequence input circuit interface is connected through a relay or open-collector transistor circuit. When connecting through a relay, use a low-current relay.
For details, refer to LECYU Operation Manual,section 3.3.2. 13 - 2.3.2 Sequence Input Circuit (1) Photocoupler Input Circuit CN1 connector terminals 6 to 13 are explained below. The sequence input circuit interface is connected through a relay or open-collector transistor circuit. When connecting through a relay, use a low-current relay.
)(43) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -42NO.ZK2-OM00801-B B /ON/OFF H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPaH_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 H_3 ,P_1 H_3 100 -43NO.ZK2-OM00801-B , (1015 ) -44NO.ZK2-OM00801-B ZK2-ZSV-A () No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -45NO.ZK2-OM00801-B No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13
The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -52NO.TQ1050188-OM002 Error No.
The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -51NO.ZL3-OM00701-A Error No.
The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product.
Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. CRX Plug-in software .20 5-4. Air supply .27 5-5. Piping .27 5-6. Operating environment .28 5-7. Lubrication .28 6. Maintenance or inspection .28 6-1. Maintenance or inspection .28 6-2.
Center of gravity .12 4.Product Specifications .13 4-1.Magnet Gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2.
Center of gravity .12 4.Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3.TMComponent .20 5-4. Air supply .24 5-5. Piping .24 5-6. Operating environment .25 5-7. Lubrication .25 6. Maintenance or inspection .25 6-1.