A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV201------------
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., REGULATOR, E/P, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 2.33384 lb
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., E/P REGULATOR, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DA, IT2000 1/4 INCPT VERSION, 1.10000 lb
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., E/P REGULATOR, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .88000 lb
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., REGULATOR, E/P SPL *LQA, INSTRUMENTATION, IT402 E/P REGULATOR, FA, IT402 1/2 INCHPT VERSION, 2.32488 lb
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, EA, IT4000 3/8 INCPT VERSION, 2.32157 lb
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 1.42198 lb
The base color of the new AC-A series is urban white, maintaining a clean, modern look.The E*00-A series will end production in March 2025. -- Please select the E*00-D series for new applications Piping adapter: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, 3/4, 1" ; Easy maintenance; Detach equipment without removing piping; Assembles to FRL's by simply tightening screws
AS Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !
Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance. REGULATOR, E/P, HIGH PRESSURE. High Press. E/P Regulator. 700.00000 lb. N11.
Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: D (Panel Mount Adapter+Front Protective Cover)
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover]
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage)
Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]
Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan)