AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

VSA4

equation M = 0.66n + 0.75 (kg) n: Station VVSA430N Dimensions (mm) n L L2 256 L1 214 2 stations 326 284 3 stations Pilot hole 396 354 4 stations 466 424 5 stations 70n + 116 70n + 74 n stations VSA4130, VSA4230 VSA4330, VSA4430 Applicable valve 4-10.5 mounting hole Manifold weight general equation M = 0.87n + 0.95 (kg) n: Station VVSA440N Dimensions (mm) n L L2 307 L1 257 2 stations 394

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Rotary One-touch Fittings Series KS/KX

UNF Weight (g) 10-32 UNF D1 D2 L2 A L1 Nylon Urethane KSL03-34S KSL03-32 8 10-32 UNF 9 14 17 23 23 29 56 64 20.5 22 22 23.5 23 25.5 26 26.5 5 32 16 2.5 10.4 3.5 3.5 12 21 1 8 12.7 1 8 1 4 KSL07-34S 14.29 17 1 4 4 13.2 8.6 8.6 23.5 14 KSL07-35S KSL09-34S KSL09-35S KSL11-35S KSL11-36S 1 8 26.5 30 18.5 5 16 1 4 1 4 3 8 21.6 14.9 6 15.2 17.46 26 17 29.5 31 34 37 35 38 22.23 3 8 30.5 25.0 7 17.9

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Self-seal Fittings Series KC

Nylon Urethane L1 L2 M 1 4 1 4 3 8 3 8 3 8 KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 2.6 32 36 42 79 105 2.6 6.8 16.2 25.6 35.4 M12 1 M14 1 M16 1 M20 1 M22 1 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 6.8 13.1 20.4 30.4 Straight: KCH Applicable tube O.D.

AC Servo Motor Driver (SSCNET Type)

[1] Power supply input terminals, L1, L2: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor input terminal (U, V, W) to the driver power terminal (U, V, W).

IDX-OM-W093

(REFRIGERANT) IDF60-20) W R 0001 (2018 4 ) W R 0001 2018 2019 2020 2021 W X y Z 1 2 3 4 o P Q R o 1 Z 12 A Z IDF60/70/80/90 Series 1-5 IDX-OM-W093 1.3 HFC 1-5 IDF60/70/80/90 Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2

IDX-OM-W035

3 122 F(50) 122 F(50) OUT IN (IN) (OUT) 2 2 4 10mm(3/8inch) IDFB Series 2-2 2-2 IDX-OM-W035 2 2 2 5 6-1 IEC ) [ 30mA IDFB22E,37E 15AIDFB55E, 75E 10A] 2) 0.3inch0.5inch (812mm) 16AWG (1.25mm IDFB22E, 37E 3 IDFB55E, 75E 4 4inch (0.1m) 98feet (30m) (3/8 10mm) IDFB Series 2-2 2-3 IDX-OM-W035 2 IDFB22E/37E 118138 mil (33.5mm) PE IDFB55E/75E 118138 mil (33.5mm) =M4X10 L1 L2

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $eri Manifold Dimensions inch (mm NZZM05-T068 ) t n: station L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.

E-P HYREG ® Series VY1 1

Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

IS3000

Light Assembly For 110 VAC: 1530118-1 220 VAC: 1530118-2 24 VDC: 1530118-5 Able to convert into L1, L2, L5 by changing each light assembly. 16-9-4

Ejector Valve Unit Series ZYY/ZYX 1

= 125 mm L3 = 108 mm L4 = 13.75 mm U side D side Solenoid valve Supply/Exhaust block Ejector valve End plate assembly L End plate assembly R L4 DIN rail 5.25 5.5 8 16.5 16.5 27 16.5 10.5 L3: Manifold overall length L2: Mounting screw length L1: Rail overall length 13-8-20

Title not found

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Vacuum

l6inHq (4mmHq) lnternal oritice diameter oO.5 o0.8 zsE2 a Weight: 62gf a SupplyVoltage: l2^24VDC (Fipple .10o" max.) a Output: Open cottector 30V 80mA a lndicalor light: Lrqhrsal ON condilion a Consumption cufient: r/rnA(et24VOCONr a Opraling tempraluret32 14O"F a Port Size: M5 (10 32 nom ) Applicable Adsorption Conlirmation Switch The relalnnsh p between vacuum pressure and adsorplion nozzle

Title not found

Response time Liie VOZ]000I0 rns -l VOZ2000 l2 ms 1 200 rfillion VoZsooo ls ms -l cYcres DIN rail mounting 3 Port Solenoid Valve Metal Seal/Rubber Seal 5 Port Solenoid Valve Metal Slsal/Rubber Seal Base Mounted Up to 063 0 . 1 7 0 3 3 0.39 0 4 5 o.3l 0 r 0 0 4 5 0.56 N C Vdlve Base Mounted N C .

The ISE70/75(H) series pressure switches incorporate a large digital display to monitor both coolant and hydraulic fluids. These high performance, yet lightweight, pressure controls are available in three styles: the ISE70 for use with air or inert and incombustible gases (monitoring a set rated pressure range between –0.1 to 1MPa), and the ISE75 and ISE75H models (for use with fluids requiring

The ISE70/75(H) series pressure switches incorporate a large digital display to monitor both coolant and hydraulic fluids. These high performance, yet lightweight, pressure controls are available in three styles: the ISE70 for use with air or inert and incombustible gases (monitoring a set rated pressure range between –0.1 to 1MPa), and the ISE75 and ISE75H models (for use with fluids requiring

The ISE70/75(H) series pressure switches incorporate a large digital display to monitor both coolant and hydraulic fluids. These high performance, yet lightweight, pressure controls are available in three styles: the ISE70 for use with air or inert and incombustible gases (monitoring a set rated pressure range between –0.1 to 1MPa), and the ISE75 and ISE75H models (for use with fluids requiring

The ISE70/75(H) series pressure switches incorporate a large digital display to monitor both coolant and hydraulic fluids. These high performance, yet lightweight, pressure controls are available in three styles: the ISE70 for use with air or inert and incombustible gases (monitoring a set rated pressure range between –0.1 to 1MPa), and the ISE75 and ISE75H models (for use with fluids requiring