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Set pressure range 0.1 to 0.83 MPa (2) Terminal block -5 to 60 (No freezing) (3) Ambient and fluid temperature marking Model A B + B Port size fo connection of pressure gauge Rc 1/8 VFR5100 A side COM Weight (kg) 0.83 Effective area at supply side (mm 2) PA 44 38 32 VFR5200 A side COM B side VFR5400 3 5 A side COM B side S at P 1=0.7 MPa/P 2=0.5 MPa PB 38 40 31 Effective area at exhaust side

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

Set pressure range 0.1 to 0.83 MPa (2) Terminal block -5 to 60 (No freezing) (3) marking Model A B + B Ambient and fluid temperature Port size fo connection of pressure gauge Rc 1/8 VFR3100 A side COM Weight (kg) 0.46 VFR3200 A side COM B side Effective area at supply side (mm2) PA 21 18.5 11 VFR3400 3 5 A side COM B side S at P1=0.7 MPa/P2=0.5 MPa PB 18.5 22 12 Applicable terminal Effective

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min. B Released Work 1 Work 2 Work n Atmosphere D Peak and bottom display function This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 2. Communication connector D-sub 9 pin (socket) Holding screw: M2.6 E 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min. B Released Work 1 Work 2 Work n D Peak/Bottom value indication Atmosphere This function constantly detects and updates the maximum (minimum) value and allows to hold the maximum (minimum) pressure value.

Effective area at supply side (mm2) PA 44 38 32 4 2 (A)(B) 4 2 (A)(B) Single Double S at P1=0.7MPa/P2=0.5MPa PB 38 40 31 Number of pilots Effective area at exhaust side (mm2) AEA 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 90 4 2 (A)(B) 4 2 (A)(B) 77 S at P2=0.5MPa BEB 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) How to Exchange Air Operated Valves Loosen set screw and take air operated valve out vertically

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

Load operation time [s] Detect the intermediate position of the stroke Load does not operate Reduce the piston speed until the formula is satisfied. < Switch operation time [mm] /piston speed [mm/s] -14No.D-S-OMZ0004 Specifications Switch part no.

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

No.VQ1000V-OMM0002-B 10 - VQ1000/2000 series Specific Product Precautions 3 Be sure to read this before handling How to Calculate Flow Rate Conversion with sonic conductance C: S=5.0XC Q : Air flow rate [dm3/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream pressure [MPa] t : Temperature [] No.VQ1000V-OMM0002-B 11 - When the valve is failing, use this flow chart

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

If a bend (R) is used, limit it to R2 or less. -54No.PF-OMN0005-E Bracket (ZS-28-B) Power and output lead wire and connector (ZS-28-A) -55No.PF-OMN0005-E Revision history A: Contents revised in several places. B: Error correction. (page 28) C: Contents revised in several places. D: Contents revised in several places. [September 2016] E: Contents revised in several places.

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

CEP: 09950-350, Brasil TEL: 11-4051-1177 FAX: 11-4071-6636 GREECE (Distributor) S.Parianopoulos S.A. 7, Konstantinoupoleos Street 11855 Athens, Greece TEL: 01-3426076 FAX: 01-3455578 DENMARK SMC Pneumatik A/S Knudsminde 4 B DK-8300 Odder, Denmark TEL: 70252900 FAX: 70252901 COLOMBIA (Distributor) Airmatic Ltda. Calle 18 69-05 Apart.