CU

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 2.00 25 1.50 20 1.00 0.50 0.00 20 30 40 50 60 70 80 90 100 Stroke (mm) Cushion Needle Adjustment Caution : Operating pressure 0.5MPa : Operating pressure 0.4MPa Graph 1 1.

PSxx-OMH0002CN

(Full span Full-scale) O PLC DC1224[V] ON-OFF 1 NPN OFF PLC PLC 2 NPN ON PLC PLC ON-OFF ON-OFF NPN PNP 1 NPN OFF ON-OFF PLC DC1224[V] 2 NPN ON R R.D. 1.0005R.D. 1.0005 = 0.05 0.8005R.D. 0.8005 = 0.04 S SUS ON-OFF ON OFF ON-OFF 25[]0 50[]-550[] )3.0[F.S.]25[] 100[kPa] F.S.=100-0=100[kPa] 3.0F.S.=1000.03=3[kPa] 050[] 3[kPa] -10No.PS-OMH0002CN-D () () 25[]ON-OFF )100

Series TPH Clean Tubing Polyolefin Tubing

Clean Tubing Polyolefin Tubing Series TPH RoHS How to Order TPH0604 B 20 Tubing model Color Length per roll Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20 m roll 100 m reel 20 m roll 100 m reel Burst Pressure Characteristics Curve and Operating Pressure Model TPH0425 4 2.5 TPH0604 6 4 TPH0806 8 6 TPH1075 10 7.5 TPH1209 12 9 Model O.D. (mm) I.D.

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

-W/K 0-100 PSI, 1/8" NPT Ports with Adjusting Knob $36.00 RVMW-5300-10-W/S 0-10 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-30-W/S 0-30 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-60-W/S 0-60 PSI, 1/8" NPT Ports with 1/4" Shaft $36.00 RVMW-5300-100-W/S 0-100 PSI, 1/8" NPT Ports with 1/4"

Information

200 3 400 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 6 Effective area (mm2) Effective area (mm2) Effective area (mm2) 06, 08 08, 10 1.0 300 06 04 2 4 50 100 200 0.5 1 2 100 0.0 0 0 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations (turns) Number of needle rotations (turns) Number of needle rotations (turns) ASG520F-03 ASG521F-03 ASG620F-04 ASG621F-04 Inlet

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

Pneumatic Purification

26 115/1/60 1/2 215 R134a 8.7 23.6 20.5 70.5 IDF8D-S 16.5 35 115/1/60 3/4 215 R134a 8.7 23.6 20.5 70.5 IDF11C-S 25 53 115/1/60 3/4 215 R22 10.2 24.4 22.4 103.6 IDF15C-S 40 85 115/1/60 1 215 R22 11.0 24.4 24.4 110.2 IDF22C1-S 58 130 220/3/60 1 215 R22 11.6 29.5 26.8 133 IDF37C1-S 96 215 220/3/60 1 1/2 215 R22 12.6 36.6 28.7 160 Flow readings at 100OF inlet temperature; 100OF ambient and 100

Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Series 10-MGF Guide table ø40, ø63, ø100

Series 10-MGF Guide table 40, 63, 100 How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. 10 Clean series Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Type Rc NPT G Bore size Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action

Solid State Vacuum Regulator

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

ALB900

To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

Model Selection 1

(choked flow) Subsonic flow : Flow greater than the critical pressure ratio Standard condition : Air in a temperature state of 20C, absolute pressure 0.1 MPa (= 100 kPa = 1 bar), relative humidity 65%. It is stipulated by adding the abbreviation (ANR) after the unit depicting air volume.