Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Wedge Cam Operation Provides

acting MRHQ MHKL2-20D 20 18 16 34 312 Auto switch MHKL2-25D 25 22 19 41 562 MHKL2-12S 90 105 20 9 11 12 9 Normally open Normally closed MHKL2-16S 165 28.6 14.6 14 16 17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of

Brake mechanism added

44 22 16 21 11.5 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189

PF2D

Flow rate range Output for display unit Note 1) + analog output (1 to 5 V) Output for display unit Note 1) + analog output (4 to 20 mA) 3/8 1/2 3/4 1 2 11 13 19 Port size (inch) 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min Note 1) Output for the display units of PF2D 300/301 04 20 40 PF2D504 PF2D520 PF2D540 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-

MXH

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30

COQ2BP

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread

3 Port Solenoid Valve Series VQ100 1

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.

MXW Series Long Stroke Slide Table

Table MXW Series Dimensions MXW 20 Stoke: 150, 175, 200, 225, 250 (mm) Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 J 20 Scale: 20% 10 Width across flats 13 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.03 depth 5.5 6H9 +0.03 depth 5.5 0 0 7 72 98 48 Y Y 25 160 40 40 40 L 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N-1) x H G Bottom through hole 5.1 GG HH H 7

Suction cups with flange

U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

7

VXZ Height Weight Class H/24 VDC Class H/DIN terminal Seal material: EPDM 7%Smaller 20%Lighter VXS (90 g) (7 mm) Approx.

Series AP500

0.14 0 10 0.00 0.07 0 100 200 300 400 Flow rate (slpm, N2) 0.69 (17.5) Max. 5.6 (142.2) AP1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 20 0.14 2.00 (50.8) A 10 0.07 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3

RB/RBL/RBQ

Basic type RBC10S RBC14S RBC20S RBC27S With cap A B 9 12.5 16 21 SR 8.7 12 18 25 MM h M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 6 6 6 C 14 19 27 36 B M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f MM RBC10C RBC14C RBC20C RBC27C RB10J RB14J RB20J RB27J RB10S RB14S RB20S RB27S 7.5 10 20 25 16.2 21.9 31.2 41.6 14 19 27 36 16.2 21.9 31.2 41.6 8 11 16 22 23 31 40 51 11 15 23 32 15 20 25

EXxx-OMZ0016

Registration of Remote 10 (Wireless channel 10) Remote Registration of Remote registration 11 (Wireless channel 11) information Wireless Registration of Remote 12 channels (Wireless channel 12) 8-15 Registration of Remote 13 (Wireless channel 13) Registration of Remote 14 (Wireless channel 14) Registration of Remote 15 (Wireless channel 15) *1: The LED indicator W-MS indicates the system

JXCx-OMT0061CN

CN4I/O . 19 (1) . 19 (2) . 20 5.4 CN5: . 20 6.

Series KV2 Fittings

11 12 12 13 13 14 14 15 15 16 16 16 17 18 19 19 20 21 22 23 24-25 26 27 28 KV2H _ _-_ _S KV2H _ _-S_ _ KV2F _ _-_ _ KV2H _ _-_ _ KV2R _ _-_ _ KV2L _ _-99 KV2U _ _-99 KV2L _ _-_ _S KV2LF _ _-_ _ KV2L _ _-00 KV2K _ _-_ _S KV2KF _ _-_ _ KV2Y _ _-_ _S KV2T _ _-_ _S KV2TF _ _-_ _ KV2T _ _-_ _ KV2U _ _-_ _S KV2U _ _-_ _ KV2UD _ _-_ _S KV2UD _ _-_ _ KV2VF _ _-_ _S KV2VD _ _-_ _S KV2Z _ _-_ _S KV2E