SMC Corporation of America
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Lateral load is applied. 42 - 6. Maintenance 6-1. Construction Fig. 23 Construction No. Description Qty Note No.

90%RH () -10 60() 90%RH () 2(0.5G) 4.9m/s IP20 200g() 220g(DIN ) 11 - 3.2 1 LED 2 STATION No.

Tightening torque Bore sizes (mm) Hexagon socket head cap screw (mm) Proper tightening torque (Nm) Piston rod lateral load (Graph 2) 20, 25 32 M5 M6 5.10 10% 8.04 10% 5.00 4.50 4.00 Selection Caution 3.50 Lateral load (N) 3.00 32 2.50 1. Operate the cylinder to the stroke end.

ZS-10-A With lead wire ZS-10-5ANote) When ordering switch with 5 m long lead wire, indicate both part numbers. Lead wire length Caution 0.6 m Nil Ex.) ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

AC, DC C.O. 7.5 55 6 45 50 42 18 60 37 12 AC Cv converted Av x 10 6 (m 2 ) VX32 AC (Full wave rectification) 50/60 10 8.5 60 1 3 5 0.08 1.5 1.0 0.6 220 1.9 VX311 -00 DC 8.5 60 11 60 9.5 50 1 3 5 0.16 0.5 0.3 220 3.8 VX312 -00 50 55 22 60 47 18 AC 0.6 370 VX3225-00 2.2 0.19 4.6 VX33 1.0 530 VX3325-00 AC (Full wave rectification) 50/60 14 11.5 60 1 3 5 0.24 DC 11.5 60 0.3 0.2 5.8 220 1.0

Reference air outlet Ventilation [IDFA150F-38/40] Heavy duty auto drain Drain tube for dripping of condensation (O.D.10, Length approx. 0.7m) Ball valve (O.D.10, Length approx. 2m) is also available.)

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 5 5 5 50mm 0mm 0mm 0mm 16 No.LFE*-OMY0008 FR0( FR0( FR0( FR0( ) ) ) ) FR1 FR1

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2

DC24 V10% DC24 V10% DC(+) DC(-) 8 / / 9 () 10 / 5 m / 11 10 1015 "-M" ( ) (kPaMPa) "-M" 12 SI kPa,MPa -49NO.ZK2-OM00801-B No. 13 14 A () 15 () / ( ) () -50NO.ZK2-OM00801-B 80mA 3.5 F.S. 1 1 F.S. -51NO.ZK2-OM00801-B 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S

VXF21A VXF22A VXF23A VXF24A VXF27B VXF28B VXF25(A,B) VXF26(A,B, C,D) Product number Orifice size mm 22 28 44 53 70 80 90 100 Air Fluid Minimum operating pressure Maximum operating pressure MPa 0.03 0.1 MPa 0.7 Fluid temperature -10 (Non-freezing) to 60 Ambient temperature -10 to 60 Coil insulation type Class B Enclosure IP65 Alloable voltage fiuctuation 10% of rated voltage AC VA 10 7

No.EX-OML0011-C PRODUCT NAME Fieldbus Device Handheld Terminal MODEL / Series / Product Number EX600-HT1A Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Names and Functions of Product 8 Definition and terminology 9 Mounting and Installation 10 Precautions before mounting 10 Wiring 11 Setting and Adjustment 12 Basic operation 12 Mode selection 13 1.

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

Theoretical Output Tightening torque: Hexagon socket head cap screw size (mm) Proper tightening torque (Nm) Bore sizes (mm) OUT IN 20, 25 32 M5 M6 5.10 10% 8.04 10% Unit: N Bore size (mm) Operating direction Operating pressure (MPa) 0.7 220 185 344 288 563 454 0.3 94.2 79.2 147 124 241 207 0.5 157 132 246 206 402 346 OUT IN OUT IN OUT IN 20 Allowable kinetic energy 25 Refer to "Selection"

FH FH 140 70 HOW 215 42 20 Hexagon socket head cap screw (M6 x 10) 4 pcs. Handling Precautions Mounting q The flat portion of the stainless steel cover functions as the contaminant adsorption surface.

Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) GWP: 20887 Refrigerant charge [oz (g)] 13.7 0.4 (390 10) 18.7 0.4 (530 10) 22.2 0.4 (630 10) 27.5 0.4 (780 10) Auto drain Float type (Normally open, Min. operating pressure: 14.5 psi (0.1 MPa)) Port size Symbol N NPT1 NPT1 1/2 NPT2 Symbol Nil R1 R1 1/2 R2 Drain tube O.D.