Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

to 5 mm on one side only 0 to 6 mm on one side only Rubber stopper 0 to 3 mm at both ends Stroke adjustment range 0 to 5 mm at both ends 0 to 4 mm at both ends Metal stopper +1 0 Stroke length tolerance mm 11-: Fluorine grease Grease 22-: Lithium soap based grease Class 3 Class 3 Without adjuster Cleanliness class (ISO class) Class 4 Class 4 Rubber stopper Class 6 Class 6 Metal stopper

7

A VXD2 Z 1A VXD2 Z 3 0 A A VXK Enter standard product number.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

ITVH

to 50C (No condensation) Weight Approx. 630 g (without options) 0 0 100 Input signal [% F.S.]

Gun Type Ionizer

The specified ambient temperature range is 0 to 40C.

Micro-Mist Separator with Prefilter Series AMH

---I -~ _:_::-::: : ::-0.7ipa ~,,:-~~.'. "". 0~~1~00 ~~2~0~~~ ~ 0 30~0-4~OLO-~50~0~~60~0 0 1500 3000 4500 6000 7500 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH350 AMH850 0.5MPa )7MPa I I // ",0.06I-Air pressure 0.3MPa '" 0.06 Inlel air pressure 0.3MPa / a. V o/pa ~pa ::;; a. V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04

PFxx-OMS0001CN

cfm 0.874.2 cfm 0.218.6 cfm 3 0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -28No.PF-OMS0001CN-A [F 1] OUT1 OUT1 ( )OUT2 H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

to 5mm on one side only 0 to 6mm on one side only Rubber stopper 0 to 3 mm at both ends Stroke adjustment range 0 to 5 mm at both ends 0 to 4 mm at both ends Metal stopper +1 0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13 to 22 for details.)

High Power Cylinder Series RHC

Bore size (mm) Stroke range (mm) Effective thread length 50 70 35 32 250 to 1000 50-0.042 0 80 16 10 23 58 20 60 80 35 32 250 to 1000 63 55-0.074 0 90 20 10 23 61 25 75 95 40 37 250 to 1000 80 65-0.074 0 95 20 10 25 63 30 90 116 40 37 250 to 1000 100 80-0.074 J ZZ P 6.8 to 11.3 WH 305 S 1/2 H1 58 NF 215 NE 24 ND 25 MM 27.7 K M18 x 1.5 JC 7 I Bore size (mm) 50 11 75 M10 x 1.5 thread depth

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

0 u !0 !2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

25

SUP = 0.2 MPa 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 50 100 150 200 0 Discharge (mL/min) 0 Discharge (mL/min) 200 400 600 800 1000 0 Discharge (mL/min) 200 400 600 800 1000 Air Consumption: Built-in Solenoid Valve/Air Operated Calculation of Air Consumption Air Consumption 45 Find the air consumption for operation with a 5 Hz switching cycle and pilot air pressure of 0.35 MPa from the air consumption

Booster Regulator/Air Tank

0 10 20 30 40 38 Capacity (L) Charge time per 10 L t (s) Charge time per 10 L t (s) 4 300 ITVX VBAT 3 PVQ 200 VBA2A VBA4A 2 VY1 Conditions: Inlet pressure: 0.5 MPa Outlet set pressure: 1 MPa Flow rate: Between 0 and max. flow rate 100 VBA VBAT VBA VBAT 1 0 0 AP100 Performance of air tank Alleviates the pulsation generated on the outlet side.

V

0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering Courtesy of Steven Engineering, Inc. !

NVEPA|VEFseies

5 1 l 3 = % =V2 0 1 0 3 NVEP 31 4 Size I Pressure Size Code PSIG (Kg7cm2) NPTF (Base mount type) 2 1 7-90 (0.s-5.5)O2=t/c 03=% 2 15-135 (1-9) 4 1 o.7 -22.5 (0.051.s) 03=% O4=th 06 =Vr Subplates (NVEF2120; NVEFII20; NVERI I20) Part No.

CL

0 !1 !2 !3 !4 !5 !6 !7 No.

Low Profile Guide Type

Left adjustment bolt Right adjustment bolt Concentrated piping on left Concentrated piping on right 1 mm to 0 mm 1 mm to 0 mm Both sides standard type 25 mm to 0 mm 1 mm to 0 mm AL type 1 mm to 0 mm 25 mm to 0 mm Piping port Piping port AR type 25 mm to 0 mm 25 mm to 0 mm A type 1542 Weight reduced by 50% Weight reduced by 50% Lightweight Lightweight Weight kg 15 25 10 Series CY1F CY1H MY2H

NCQ8

0 !

RSH/RS1H

0 !9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

RSQ

0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !