Piping: Body Ported, Stations & Port Location: 16 Stations (Type 21, 41, 42), Port Size: -, Thread: -

Piping: Body Ported, Stations & Port Location: 20 Stations (Type 21, 41, 42), Port Size: -, Thread: -

Piping: Base Mounted, Stations & Port Location: 14 Stations (Type 20, 21, 41, 42), Port Size: 1/8, Thread: NPTF

Piping: Body Ported, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: None, Thread: NPT

Piping: Body Ported, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: -, Thread: -

Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: -

Piping: Base Mounted, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: -

Piping: Base Mounted, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: ø8 One-touch Fitting, Thread: -

Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: ø8 One-touch Fitting, Thread: -

Piping: Body Ported, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: -, Thread: -

Piping: Base Mounted, Stations & Port Location: 2 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: -

•

. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

56.5 13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41

Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

AZ1000

Vespel is a registered trademark of DuPont. ) If connection size differs, flow characteristics also differ. 41 Single Stage Regulator for Ultra High Purity High flow (Tied-diaphragm) Series AZ9200 For UHP gas delivery Inlet pressure : Max. 300 psig (2.1 MPa) Flow capacity to 2000 slpm Body material: 316L SS How to Order Port Number q w e AZ92 S FV12 FV12 02 2PW Delivery pressure Bonnet option

COQ2BP

Maximum operating pressure 145 psi (10.2kgf/crnZ) Ambhtnt and fluid temperature 41 140"F (5 60"C) (M3xO.Sx16L) D-P7 BOPt Switch mounting bracket screw 2 pes. D-PS 050 (M3xO.5xI 4L) Lubrication Non-lube Support typo Standard Switch mounting nul: 1 pc. Spring washer. 2 pes. Cu8hlon Not available Rod .d thread Male lhread (Sid.) Nominal diameter: 3mrn : ~1,,;; Thread tolerance J!

Cylinder

.~ 6 7 12 13.9 6 12.5 19.5 26.5 85 9 3.5 M3XO.5 Ml0X 1.Q 9 18.5 25.5 32.5 3 27.5 34.5 41 .5 3 10 ' h-~o 19 22 6" 14\5 21 28 12 12 3.5 I M4 XO.7 I MI5 X 1.5 1.1 ~ 2075 27 34 4 32.5 39 ~46 5 Series CJP How To Order Pin cylinder e-' '-. Rod end thread J Nil-With thread BWithout thread Mountin9 ~ BPanel mount type ..

NAAMS Standards Compliant

HF Handle position: Left Handle position: Right [mm] Bore size Arm opening angle HF Bore size H HA HD 50 250 61.5 40 63 250 64.5 40 15 36 30 49 45 61 60 73 75 87 90 101 105 114 120 124 50 15 41 30 55 45 68 60 81 75 94 90 107 105 117 120 124 63 5 NAAMS Standards Compliant Power Clamp Cylinder CKZ3N -X2742A -X2568 Dimensions: Clamp Arm Bore Size 50 Clamp Arm Code List Straight: Plain Bore size

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch