CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Membrane Air Dryer

H L S 15 25 50 100 200 600 750 1000 40 Select from Series IDG1 3 5 10 20 60 75 100 Symbol Type 01 02 03 04 $ $ 1/8 Nil Rc JIS Symbol $ $ $ $ $ 1/4 N F NPT $ $ $ 3/8 G $ $ $ 1/2 Option Symbol Contents Size 1 5 10 20 3 60 75 100 Bracket Assembly (Accessory) Part No. $ $ $ $ $ $ $ $ Nil None (Standard) P R S $ $ $ $ $ $ $ $ With fitting for

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

Rotary Actuator/Vane Style Series CRB2

+5 0 +5 0 Note 1) For single vane type, rotation tolerance of 90, 180, and 270 actuators will be for size 10 actuators only.

CM2

1 No. !2 !3 !4 !5 !6 !

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

30

" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 3/8" 1/2" Note 1) D is maximum diameter.

ALF400 to 900, ALT-5/-9

F L A N 5 1 . 3 ) 0 8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 /

Fieldbus system PROFIBUS DP compatible SI unit

Station status 2 7 6 5 4 3 2 1 0 Byte 1 0 1 Bit No.

Cylinder with Lock

5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

EXxx-OMO0027

User setup Object Dictionary Index Base Type Value Text 0 0.1 ms 1 1 ms 0800 USINT 2 10 ms 3 20 ms 0 1 ms 1 15 ms 0801 USINT 2 100 ms 3 200 ms 0 Offset binary 1 Sign & magnitude 0802 USINT 2 2's complement 3 Scaled 0 None 1 2 value average 0803 USINT 2 4 value average 3 8 value average 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 0804 USINT 4 05 V 5 15 V 6 020 mA 7 420 mA 0 010 V 1 05 V 0805 USINT

HRL

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.

Hygienic Design Cylinder Series HY

8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF G 1/8 G 1/8 G 1/4 G 1/4 G 3/8 G 1/2 TN NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 81 81 83 95 107 107 131 131 5 5 6 6.5 8 8 9.5 11.5 6 8 10 13 16 16 22 27 30 30 35.5 44 55 69 80 100 24 29 35.5 44 55 69 80 100 33 33 69 69 71 78 90 90 108 108 D-X Individual -X Technical data 857 Hygienic

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

EXxx-OMS0026CN

byte3 815 SEN3(5) Byte4 AXA 0 Hi byte 1623 (0) Byte5 Lo byte 2431 Byte6 AXA 1 Hi byte (0) Byte7 Lo byte Byte8 DXB(3) 07 Byte9 07 DXD(4) Byte10 815 Byte11 Padding 12 byte 6 byte 1(42 ) -61No.EX-OMS0026CN SI ( ) 0 0 byte 1 + 4 byte -62No.EX-OMS0026CN byte Bit No. 0 1 2 3 0 4 ON/OFF 5 6 7 / 0 1 2 Reserved 3 () 1 4 () 5 Reserved 6 7 0 0 1 1 2 2 3 3 2 4 4 5 5 6 6 7 7 0

44

H2 H1 1/8" (3.18) 0.086" (2.18) KFG2F0122-N02 25 8 1/4 26.7 17.2 5 1.5 1.1 17 d KDM 0.098" (2.5) 5/32" (4) KFG2F0325-N02 23 8 1/4 26.7 17.2 5 1.8 1.6 17 KB 1/4" (6.35) 5/32" (3.95) M L2 L1 KFG2F0704-N02 28 12 1/4 27.5 16.3 6 3.3 6 17 KR 5/16" (8) 0.236" (6) KFG2F0906-N03 32 14 3/8 29.4 17 6.6 5.3 17 19 Applicable tubing KA 3/8" (9.53) 1/4" (6.35) KFG2F1163-N03 38 17 3/8 30.5 16.1 7.6 5.6