90

size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.

Fieldbus System

) 1 (P) 5 (R1) Function 3-position double check Nil R Standard (1 W) External pilot Low wattage type (0.5 W) Y Note 2) (A) 4 (B) 2 6 3 (R2) 1 (P) 5 (R1) Note 1) When two or more symbols are specified, indicate them alphabetically.

Compact Manifold Regulator

, 5/16 6 6 8, 5/16 3 11.5 19.5 20 23 10, 3/8 10, 3/8 1/4 1/4 7 11.5 22 22 26 1/4 1/4 19 20.5 737 ARM11A/B Series End Block Pressure Gauge ARM11E L Part no.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Dual Speed Controller with One-touch Fitting Series ASD

8 w @1 !4 !3 !8 w @1 !4 !3 !8 w @1 !4 !3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !

Mini Free Mount Cylinder

coefficient: 0.2 8 6 1 4 0.1 Tightening torque Tightening torque 0.01 0.01 0.1 1 2.

Plug-in/Plug Lead: Single Unit

), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Special wiring specifications (Except double wiring) Name plate (T kit only) Symbol Series Nil CD1

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1..3 Reserved 4 (Ch0&1 in) Monitor over range 0: disable, 1: enable 2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Analogue data format 0: offset binary, 1: signed magnitude, 2: 2s complement, 3: linear scaled Channel parameter Channel 0 to 1 0..2 (Ch0 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in)

HRX-OM-M005

Pump ECO Limit 5.3 Operation Screen HRZD Series 5-6 HRX-OM-M005 Chapter 5 Product Operation 5.3.4 CH1(2) setting data screen 1, 2 1 2 Figure 5-7 CH1(2) Setting Data Screen 1 3 4 5 6 Figure 5-8 CH1(2) Setting Data Screen 2 Table 5-6 CH1(2) Setting Data Screen 1, 2 No.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" Applicable connector: 26 pin MIL type with strain relief (Conforming to MIL-C-83503) (L4) L3 6.6 (3.2) 101.2

ZP3

polyurethane tubing Barb fitting U4 For 4 soft tubing U6 For 6 soft tubing 5 E E A10 M10 x 1 A12 M12 x 1 A B F Model A B C2 D E F Vacuum inlet direction q Pad dia.

HRX-OM-T002

Option . 6-1 6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 HRS090 Series HRX-OMT002 Contents 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !

AC

size 4 3 / 8 3 8 3 AV 2 1 Air Fluid AU 1.5MPa Proof pressure 1.0MPa Max. operating pressure AF 0.05 to 0.7MPa 0.1 to 0.85MPa Set pressure range AR : 34 8 3 : 56 2 1 : 84 Max. effective area (mm2) (OUT IN) / / 4 1 4 1 : 6 : 6.5 2.8 92 : 127 203 1: 131 8 3 : 26 : 31 4 1 4 1 4 3 8 3 : 18 : 20 8 1 IR 8 1/ 8 1/ 8 1/ 4 1 4 1 Pressure gauge port size 16 1 4 1 4 1 VEX Ambient and fluid temperature

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

HRX-OM-X010

C to 34.1 deg C. 5-37 5.4.2 Example 2: Communication mode is switched from LOCAL to SER REMOTE. . 5-39 5.4.3 Example 3: PUMP IV is switched from FLOW to FREQ. . 5-40 Chapter 6 Error Message and Troubleshooting . 6-1 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection