Certificate: w/Calibration Certificate, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

Certificate: w/Calibration Certificate, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

Calibration Certificate: w/Calibration Certificate, Series: Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

: °C), Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

Bracket: R (w/Bracket), Calibration Certificate: A (w/Calibration Certificate), Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)

PFxx-OMP0001CN

min] ON OFF [] PFMB7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMB7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMB7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(28)[F 2]OUT2(36) -22No.PF-OMP0001CN-F <> 1 [P_1][n_1][] 500 L/min

CE2

Cylinder speed < Counting speed of the counter (Cylinder speed 500 mm/sec = Counting speed of the counter 5 kcps) RS Q G RS H A RZQ MI W S Example of Recommended Pneumatic CEP1 Horizontal mounting Vertical flat mounting Vertical overhead mounting CE1 W W CE2 ML2B C J G5-S CV MVGQ Note) In the case of light load, regulate head side supply pressure.

Compact and Lightweight

L-bracket (Brackets on both sides) L L x n pcs. + J x 2 L x n pcs. + K x 2 Long clamping screw set which is required for assembly needs to be ordered separately. Refer to page 224.

Solid State Auto Switches

Pin arrangement 4 3 3 Cable length Connector model S M L A B D 0.5 m 1.0 m 3.0 m M8-3 pin M8-4 pin M12-4 pin Note) L is available for the D-P4DW type only. Note) Type D is available for the D-P4DW type only.

Vacuum Saving Valve

Example of Selection from Minimum Operating Flow 100 Example) Vacuum saving valve used: ZP2V-A8-05 From Table 1, Q2 can be calculated as 5.0 l/min (ANR). 90 31 {l/min (ANR)} 5 {l/min (ANR)} 80 N = 6 (unit) Vacuum pressure (kPa) 70 Q2 = 5.0 l/min (ANR) 60 Table 1.

LMU100/200 Series Mist Spray Unit

0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(Station 1) Light/Surge voltage suppressor Side A: Orange Side B: Green 18.9 (DIN rail dimension) (62.4) ON ON 43.5 OFF OFF (7.5) 34.2 Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

Air Catch Sensor

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

Series VCS

L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

PF-OMM0004_C

min 216 L/min 540 L/min 10100 L/min 50250 L/min 3.555.0 L/min ( 3.5 L/min 0.0) 1.722.0 L/min ( 1.7 L/min 0.0) 0.355.50 L/min ( 0.35 L/min 0.00) 20350 L/min ( 20 L/min 0) 7140 L/min ( 7 L/min 0) 0.355.50 L/min 1.722.0 L/min 3.555.0 L/min 7140 L/min 20350 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse 090 () 070 ( ) L/minL

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.