IDF4E IDF3E IDF2E IDF1E Air flow capacity 100 200 310 500 740 1200 1650 310 500 740 50Hz l/min(ANR)Note1) 110 220 60Hz 350 570 810 1300 1820 350 570 810 Inlet air pressure(MPa) 0.7 Inlet air temperature(C) Rated conditions 35 Saturation 55 Saturation Ambient temperature(C) 32 Outlet air pressure dew point 10 Working fluid Inlet air temperature(C) Compressed air 5~80 5~50 Operating range
IDFA 100 F 40 C G K 100 125 150 ) 100kW 125kW 150kW ) R V 38 AC380V(50Hz) 40 AC400V(50Hz) C G K R V IDFA100F150F 1 1 1.1 IDX-OM-U022 1. 1.2 1.2.1 (C) 1.2.2 G . 1.2.3 K 1.6MPa 1.2.4 R 30A (IDFA100F, IDFA125F, IDFA150F) 30mA 1.2.5 V ON 1.5 OFF 0.5 IDFA100F150F 1 2 1.2 IDX-OM-U022 1. 1.3 A 3 A IDFA100F150F 1 3 1.3 IDX-OM-U022 1.
0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.
Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.
A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.
, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.
AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure
AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500
1000mm/sec 80 and 100 50 to 700mm/sec Action Double acting, Single rod Use the actuator with allowable kinetic energy or less.
With auto switch CRQ2B S 20 90 CDRQ2B S 20 90 A90 S Shaft type Built-in magnet Single shaft Double shaft S W Rotation 90 80 to 100 170 to 190 180 Size Shaft type 10 15 20 30 40 Air cushion Single shaft Double shaft S W Rotation Air cushion Without Without With Sizes 10, 15 Nil Nil C 90 80 to 100 170 to 190 180 Size 20, 30, 40 10 15 20 30 40 Air cushion Auto switch model Air cushion Without
(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R(PT) thread installation.
The load voltage is 100 or 200VAC. Use a contact protection box in any of the above situations. The life of the contacts may otherwise be reduced. (They may stay ON all the time.)
EDS Enable (SC_MonSs) 1 Disable Enable (Inrush) 100 msec 2 Disable 0.1 ms 1.0 ms 1.0 ms 10 ms 20 ms 3 (Filter_T) 1.0 ms 15 ms 15 ms 100 ms 200 ms 4 (SigExt_T) Enable (SC_MonOp) 5 1 Disable Auto (SC_RstOp) 6 Manual Enable 7 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 8 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 9 (Idle_MD) ForceON ON ON Enable Val165000
22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28 0.19 Back pressure (MPa) Back pressure (psig) 26 0.18 5.6'' MAX. (142) P OPTION 24 0.17 5.0'' MAX. (127) 22 0.15 1.50'' (38.1) 20 0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) .69'' (17.5) 2.00'' (50.8) A A Connections in A
Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto
0 2 4 4.5 100% 0 2 4 4.6 102% 0 2 4 4.4 98% 0 2 4 4.5 100% Time it takes to clog the filter (min) The values in percentage indicate the percentage of times when the time it took to clog the filter for the first time is set to 100% Introduce a certain concentration of dust and back-flush the filter when the pressure loss reaches 0.2 MPa.
Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)
Operating Pressure 104 to 107 Surface resistance Note) Miniature fittings: Only the following types are available for M and MS series Max. operating pressure (MPa) M Series MS Series M-3AU-3, M-3AU-4, M-5AU-3, M-5AU-4 M-5AU-6, M-5H-4, M-5H-6 MS-5AU-3, MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 How to Order 100 TAS1065 B Operating temperature (C) Length per roll Color Length 20 m roll 100 m reel
Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14
a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.