VHS The valve will malfunction when air pressure is supplied from other ports. 3. Do not use the valve under negative pressure. Component Parts No. Zinc die-casted Aluminium die-casted Material Note q Description Valve guide Body Chromated Chromated Chromated Selection w e Handle r Brass Valve Zinc alloy Caution 1. The valve must be switched to each position instantly and securely.
Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.
System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), IO-Link compatible vacuum pressure switch: 3 (-100 to 100 kPa, w/ Unit Selection, w/out Energy Saving), Connector: H (300mm Lead wire with M12 connector for IO-Link), Vacuum, V Port: 08 (Metric Size, ΓΈ8 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female
Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)
Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.
Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.
Description Material Note q Body A White PBT Body B Brass Electroless nickel plated w Needle Brass Electroless nickel plated e Seat ring Brass r (1) Electroless nickel plated (2) Lock nut Brass t Red painted Handle Aluminum alloy y Red Push button POM u Cassette POM, Stainless steel i U seal o NBR Seal !0 NBR O-ring !1 NBR O-ring !2 NBR O-ring !3 NBR Valve core !
) NARM2500 Individual IN 1 4 1 4 1 8 Common IN 1.04 (0.47) .24 (0.11) 3 8 1 2 1 8 NARM3000 Individual IN 3 8 3 8 1 8 Weight by number of stations lb (kg) Stations Model 2 3 4 5 6 7 8 9 10 1.50 (0.68) 2.12 (0.96) 2.71 (1.23) 3.33 (1.51) 3.92 (1.78) 4.54 (2.06) 5.14 (2.33) 5.75 (2.61) 6.37 (2.89) NARM2500 2.67 (1.25) 3.86 (1.75) 4.96 (2.25) 6.06 (2.75) 7.19 (3.26) 8.29 (3.76) 9.39 (4.26) 10.49
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
JIS Symbol Construction/Dimensions AD402 AD600 Rc 1/4, 3/8, 1/2 Valve assembly Body Rc 3/4, 1 O-ring Body Gauze Lever Valve HA O-ring Chamber Piston assembly AT Float Spring Case ID Long hole of chamber Piston O-ring AMG Rc 3/4, 1 Drain guide Component Parts AFF Drain Rc 3/8 No. q Description Body Material Aluminum die-casted AM Working principle (AD402) When no pressure is applied internally
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
3 Poppet valve !2 Initial spring !1 Opening and closing valve piston !0 Initial air supply valve pilot port S @0 Bonnet assembly q Main air supply valve pilot port M !9 Diaphragm (Material: Stainless steel 304) u Valve seat (Material: FKM) y External seal (Material: FKM) e Bellows (Material: Stainless steel 316L) !
Description Material Note 1 Stud Carbon steel Zinc chromated q w t r y u 2 Bowl Aluminum alloy Chromated 3 Socket Carbon steel Zinc chromated e 4 Ring Rolled steel Nitriding treatment 5 Slider Rolled steel Nitriding treatment 6 Plate Rolled steel Zinc chromated 7 Dust cover Synthetic rubber Replacement Part No. Description Part no.
Note 3) See How to Order below for items represented by .
CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !
(mm) H2 Q P L W H1 Model TMA-06 TMA-08 TMA-10 TMA-12 28 21.7 172.5 31.8 25.4 151.2 35 28.1 167.3 37 19 151 17.9 20.3 24.3 26.7 18.6 18.6 22 22 11.4 12.6 15 16.2 6 12 10 8 15-6-32 1 Related Products: Tube Cutter Series TK Tube Cutter: TK-2 Possible to cut a tube up to 18 mm.
FC2W-X110 How to Order Piping port size Flow rate control range Symbol Port size 03 3/8 0.5 to 4.0 L/min FC2W504 03 X110 3 2.0 to 16.0 L/min FC2W520 X110 3 04 Piping port size Lead wire 3 Lead wire with connector (3 m) Symbol Port size 04 1/2 Specications Model FC2W504-03-3-X110 FC2W520-04-3-X110 Applicable uid Water Flow rate detection method Karman vortex Flow rate control range 0.5 to
Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 1/4, 1 1/2 2 145.5 155 216 241 39.5 43 75 90 73 78.5 94.5 109.5 3 7 5 10 1/4 1/4 1/4 1/4 67 78 110 140 46.5 85 48 52 80 90 B24P B25P 80 98 126 160 14-4-17