Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Standard

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 6R (6 + R), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 6 (Nylon Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

IDX-OM-P023E

Change ground water to tap water.) b) Consult a water treatment consultant about how to treat the water. c) Change the cooling method from transient type to circulating type, and use applicable facility water.

IDX-OM-P026E

Change ground water to tap water.) b) Consult a water treatment consultant about how to treat the water. c) Change the cooling method from transient type to circulating type, and use applicable facility water.

IC

/C Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.

Clean Air Module

M5 Rc, NPT 1/8 0.8 to 1.0 2. Use the pilot ports and sensor (respiration) port as follows. Sensor (respiration) port Respiration Respiration Respiration PB port Respiration Pressurization Pressurization PA port Pressurization Respiration Pressurization N.C. N.O. Double acting For N.C. and N.O. type, the port which is not pressurized should be open to atmosphere.

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 10, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: M5 (M5 x 0.8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Cylinder Side: M5 × 0.8, Pipe Connection Bore Dia. Electromagnetic Valve Side: M5 × 0.8

Cylinder Side: M5 × 0.8, Pipe Connection Bore Dia. Electromagnetic Valve Side: M5 × 0.8

Cylinder Side: M5 × 0.8, Pipe Connection Bore Dia. Electromagnetic Valve Side: M5 × 0.8

Cylinder Side: M5 × 0.8, Pipe Connection Bore Dia. Electromagnetic Valve Side: M5 × 0.8

Compressed Air Preparation Filter

AD27-D AM54P-m120AS-C AM64P-m120AS-C With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)

Booster Regulator/Air Tank

Connected to VBA20A, 40A VBAT20A1 Material: Carbon steel Connected to VBA22A, 42A Tank IN port Rc 1/2 Booster regulator IN port Booster regulator IN port Tank OUT port Rc 1/2 C C Spare port Rc 1/2 EXH: C EXH: C (A) (A) D (B) (B) OUT OUT 305 180 206 206 4 x 13 4 x 13 50 50 200 100 100 400 Drain port Rc 1/4 200 674 (mm) D Note) 469 493 685 A 481 520 444 477 B 394 429.8 394 429.8 C Rc 3/8

MB

MB MBW MBK MBQ A C Standard model no.

HRX-OM-X037

Indication Item Setting and selection Setting range [High] Set the temperature range of the circulating fluid SP. +0.1 C to +10.0 C +1.0 C Upper/lower temperature limit (1) High/ Low [Low] Set the temperature range of the circulating fluid SP. -0.1 C to -10.0 C -1.0 C TEMP READY signal is output when the set time has passed after the circulating fluid temperature rises/drops within the

10

0.3 to 1 RB series M8 x 1.0 RB0806(C) RB1006(C) M10 x 1.0 Basic type RB1007(C) P.895 to Stopper nut 0.05 to 5 RB1411(C) M14 x 1.5 RB1412(C) RB2015(C) M20 x 1.5 M27 x 1.5 RB2725(C) RBL1006(C) RBL series Coolant resistant type Basic type M10 x 1.0 RBL1007(C) RBL1411(C) P.906 to 0.05 to 5 M14 x 1.5 RBL1412(C) RBL2015(C) M20 x 1.5 M27 x 1.5 M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 RBL2725