Piping: Base Mounted, Stations & Port Location: 8 Stations Type 20, 21, 41 and 42, Port Size: ø6 One-touch Fitting, Thread: -
Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: NPT
Piping: Base Mounted, Stations & Port Location: 10 Stations (Type 20, 21, 41, 42), Port Size: ø8 One-touch Fitting, Thread: -
Piping: Body Ported, Stations & Port Location: 2 Stations Type 20, 21, 41 and 42, Port Size: None, Thread: NPT
Piping: Body Ported, Stations & Port Location: 16 Stations (Type 21, 41, 42), Port Size: -, Thread: -
Piping: Body Ported, Stations & Port Location: 20 Stations (Type 21, 41, 42), Port Size: -, Thread: -
Piping: Base Mounted, Stations & Port Location: 14 Stations (Type 20, 21, 41, 42), Port Size: 1/8, Thread: NPTF
Piping: Body Ported, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: None, Thread: NPT
Piping: Body Ported, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: -, Thread: -
Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: -
Piping: Base Mounted, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: -
Piping: Base Mounted, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: ø8 One-touch Fitting, Thread: -
Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: ø8 One-touch Fitting, Thread: -
Piping: Body Ported, Stations & Port Location: 4 Stations Type 20, 21, 41 and 42, Port Size: -, Thread: -
Piping: Base Mounted, Stations & Port Location: 2 Stations Type 20, 21, 41 and 42, Port Size: 1/8, Thread: -
• . ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!
18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37 14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41
56.5 13.3 ASV 24.5 28.5 9.3 19.2 47 (48) AS32l1FSl-U02-08 8 13.2 22.7 33 14.2 AS32l1FSl-U02-10 10 15.9 26.7 37 35.7 15.6 48 (49) AS32l1FSl-U02-12 12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41
Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE
Vespel is a registered trademark of DuPont. ) If connection size differs, flow characteristics also differ. 41 Single Stage Regulator for Ultra High Purity High flow (Tied-diaphragm) Series AZ9200 For UHP gas delivery Inlet pressure : Max. 300 psig (2.1 MPa) Flow capacity to 2000 slpm Body material: 316L SS How to Order Port Number q w e AZ92 S FV12 FV12 02 2PW Delivery pressure Bonnet option