Electro-Pneumatic Proportional Valve

1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q

Precision Clean Regulator

1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

Thermo-chiller Basic Type HRSE Series

Note 6) Required ow rate for cooling capacity or maintaining the temperature stability. The specication of the cooling capacity and the temperature stability may not be satised if the ow rate is lower than the rated ow. Note 7) Purchase an earth leakage breaker with current sensitivity of 15 mA or 30 mA/power supply 100 VAC separately.

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T NBR seals FKM seals EPR seals A B C None With bracket Nil B Note) Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 110

VQC4000

How to Order Sub-plates [Option] VQ4000 PW 02 CE-compliant Porting specications Nil Q CE-compliant Nil Side ported B Bottom ported Note) Thread type Port size Replacement of pilot valve assembly (Voltage) Refer to page 640 for pilot valve assembly part numbers.

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

3 Port Solenoid Valve Body Ported Series VQZ100/200/300 Single Unit [Option] Plug Lead Unit VQZ100 / How to Order Valve Series VQZ 1 1 5 5 M C6 1 PR CE compliant CE marked 1 VQZ100 body width 10 mm Nil Q Note) For CE compliant models, DC-type only. Type of actuation N.C.

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Standard, Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 11 (Body Ported), Voltage: 6 (12 VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Bracket: 1 (Bracket), Lead Wire Length: 6 (Grommet, 600mm; Light/Surge: No), CE Compliant: Q (CE Compliant)