Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

continuous voltage uctuation) Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Applicable earth Note 8) leakage breaker Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current Note 5) A 15 8 Rated power consumption Note 5) kW (kVA) 4.6 (5.2) 5.0 (5.6) Noise level (Front 1 m/Height 1

NVEPA|VEFseies

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Electro-Pneumatic Valve NVEP/NVEF Series

NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

ISO Cylinder

3 A B A B A B A B A B 8 5 5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3] 10 (7) [4] 16 7.5 (8.5) 16 6 (

NCG/CG1

3 3 3 4.5 4.5 4.5 6 67 + l 74 + l 75 + l 4 4 4 4 5 5 6 6 32 36 44 54 66 82 100 120 6 6 7 7 10 12 11 14 44 49 58 71 86 106 125 150 20 22 25 30 40 45 55 65 47 7 15 10 3 130 (138) + l 20 110 (118) 45 (53) 52 7 15 137.5 (145.5) + l 10 3.5 25 115.5 (123.5) 45 (53) 53 139.5 (147.5) + l 8 16 10 3.5 32 117.5 (125.5) 83.5 + l 51 (60) 63.5 8.5 16.5 10 4 155 (164) + l 40 135 (144) 95.5 + l 55 (67) 50

LEC-OM02904

15 P()-N() () (1) (2) (3) (4) (5) (6) 2 7 2 2.6 10 10 13(23) 12.2 (1) (40) 10 (2) 10 (3) 1 3 2 3 2 8 3 3 . 2 3.1 . 3 3.2 . 7 3.3 . 9 3.3.1 . 9 3.3.2 . 10 3.3.3 CNP1CNP2CNP3 . 12 3.4 . 19 3.5 () . 20 3.6 . 23 3.7 . 24 3.7.1 . 24 3.7.2 . 25 3.7.3 . 27 3.8 . 28 3.9 SSCNET . 29 3.10 . 31 3.10.1 . 31 3.10.2 . 32 3.11 . 33 3.11.1 . 33 3.11.2 . 34 3.11.3

A_HEC-OM-K001

. 3-2 3.2.3 Learning control function . 3-2 3.2.4 External sensor control function . 3-3 3.2.5 Temperature sensor fine control function . 3-3 3.2.6 Memorization of Set values function (Function that backs up with EEPROM) . 3-3 3.2.7 Temperature Upper / Lower Limit Alarm Function . 3-4 3.2.8 Communication Function. 3-4 3.2.9 Remote ON/OFF function. 3-5 3.2.10 Output cutoff Alarm Function

Programless controller Step motor (servo 24 VDC)

moving to position No. 11 Forward direction (2) Reverse direction (3) Start position End position Operating direction speed acceleration Operation method (1) No. 10 No. 11 Reverse 9 7 Positioning (2) No. 11 Reverse 9 7 Positioning (3) No. 11 No. 10 Forward 5 3 Positioning I/O timing chart when the electric actuator is operated by PLC.

CNG

300 301 to 800 Bore size (mm) 20 25 32 40 P K KA M MM S NA PG PH PL LC LD LH LS LT LX LZ X Y W XA XB 5 6 3 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 4 6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28

CNG

300 301 to 800 Bore size (mm) 20 25 32 40 P K KA M MM S NA PG PH PL LC LD LH LS LT LX LZ X Y W XA XB 5 6 3 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 4 6 25 117 (125) 3 50 62 15 7 10 3 12 5.5 8 3.5 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 4 6 28 127 (135) 3 57 70 15 7 10 3 12 5.5 10 3.5 M10 x 1.25 35.5 1/8 26.5 2.5 73 154 (162) 4 6.6 28 128 (136) 3 60 74 16 8 10 3 12 6 14 4 M14 x 1.5 44 1/8 28

VEX1

R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz (Ex.)

JXCx-OMX0009

Cable colour Terminal No. 8 8m* Vcc B-1 Brown 12 GND A-1 Black 13 A 10m* A B-2 Red 7 A A-2 Black 6 B 15m* B B-3 Orange 9 C 20m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 * Produced upon receipt SD-(TX) A-4 Black 10 of order Black 3 Actuator side Controller side (14.2) (c) (b) (10.2) (5.5 (6.7 (12.7) 6 2 1 (a) (14 (18) A B 5 6 (13.5) 1 3 1 4 2 1 (30.7) (14.7) 15 16 (d) L (10) (11) 10 - [2] Actuator

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

JXCx-OMT0062

SV.00 (1) (4) (10) (9) (5) (6) ARX830007 3 (7) Label of Controller version Example) SV2.07-1.00 (8) (11) A Side No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

SYJA5000 Series

Subsonic flow when (P2+0.100)/ (P1+0.100)>0.5 Q=240S P(P1+0.100) Sonic flow when (P2+0.100)/ (P1+0.100)0.5 Q=120S (P1+0.100) Q: Air flow ratedm 3 /min(ANR) 2 ) P: Differential pressure P1P2MPa P1: Upstream pressureMPa P2: Downstream pressureMPa Correction for different air temperatures Multiply the flow rate calculated with the about formula by a coefficient from the table below.

HRX-OM-W038

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 3.4 Piping . 3-17 HRS Series HRX-OM-W038 Contents 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

300 103.5 23.4Mounting holes (Lead wire length) 47.5 18 7.2 7.2 SY 3 R3 2 4 SYJ 22 10 SMC SMC 5 1 3 Manual override Cover diameter 1.6 Cross section 0.34mm2 SX 42 36 3 VK VZ VF M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) VFR VP7 46.5 VP4 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE

HEC_W-E

-8-8 8.6.3 SETTING MODE, LEVEL 3 -8-10 9 ALARM -9-1 9.1 HOW TO IDENTIFY ALARM -9-1 9.2 ALARM INDICATION -9-2 9.3 HOW TO RESET ALARM -9-3 9.4 ALARM CODE LIST-9-3 9.5 TROUBLESHOOTING -9-5 10 APPENDIX -10-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.

HRX-OM-O021

and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation signal input . 3-12 3.3.5 Wiring of operation signal output and alarm signal output . 3-14 3.3.6 RS-485 Communication wiring . 3-15 3.3.7 RS-232C Communication wiring . 3-16 HRS Series HRX-OM-O021 Contents 3.4 Piping . 3-17 3.5 Fill of circulating fluid . 3-19 3.6 Option J Piping ofAutomatic fluid filling . 3-20 3.7