SQ1000/2000

SQ1000 12ms or less 200 million cycles The 3 port valves on the A and B sides can operate independently. SQ2000 20ms or less Model JIS symbol A side B side When used as 3 port valves, only half the number of stations is required.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

A 2 to 200 L/min flow range option has been added. A rear ported type has been added. A flow adjustment valve (0.05 to 5 L/min) has been added.

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

33

*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.

Electric Actuator / Slider Type 《 AC Servo Motor 》

master unit) Power supply DC24V Battery LE-MR-J3BAT (accessory) Encoder cable Standard Robot Absolute Encoder (SSCNET III) option USB cable LEC-MR-J3USB Setup software Driver Main circuit power connector (accessory) Prepared by user (MR Configurator2TM) LEC-MRC2 Power supply 1-phase 100 to 120VAC (50/60Hz) 200 to 230VAC (50/60Hz) 3-phase 200 to 230VAC (50/60Hz) option PC Regenerative option

Electric Slide Table / High Precision Type 《 AC servo motor 》

to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

CQ2

X 175 l -100DC Construction -100DC X 190 l X 200 l Double acting/Single rod Rod end male thread Component Parts Replacement Parts: Seal Kits Bore size (mm) Kit No.

REC

*Calculation example: REC32-200 Basic weight 0.90 (Foot style 32) Additional Weight 0.09/50 stroke Cylinder stroke 200 stroke 0.90+0.09 X 200/50=1.26kg Auto Switch Mounting Bracket (including band and screw) Applicable auto switch Bore size (mm) 20 25 40 32 D-C73, D-C76, D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7B, D-H7C, D-H7A1, D-H7A2 D-H7NW, D-H7PW, D-H7BW D-H7LF

MTS

160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang L (mm

MXW

400 500 100 200 300 400 600 500 100 200 300 400 600 Load (N) Load (N) Load (N) 8-7-5 6 Long Stroke Slide Table Series MXW 8, 12, 16, 20, 25 How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Refrigerated Air dryer Series IDU/IDF

/200 to 220VAC (50/60Hz) Single phase, 220, 240/200 to 240VAC (50Hz) Power source 225 275 205 240 182 189 250 350 220 280 265 275 305 380 300 350 280 295 340 415 325 375 332 50Hz 60Hz 50Hz 60Hz 50Hz 50Hz 50Hz 100 VAC 200 VAC Power consumption (W) 220 to 240VAC 220VAC 240VAC JIS Symbol 10 (for 100VAC), 5 (for 200VAC) Air cooled R134a Circuit breaker (A) Note 3) Refrigerated air dryer

Applicable Auto Switch Model

Cylinder series Bore size (mm) Technical Data 20 25 32 40 CDM2, CDBM2 CDLM2 BM3 020 BM3 025 BM3 032 BM3 040 Part No. of auto switch mounting band Cylinder series Bore size (mm) 20 25 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M CDVS, CDLA, CE2, CNA CDL1 BS1 -125 BS1 -140 BS1 -160 CDS1 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1

VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

200/230VAC Note) Refer to pages starting with 205 for driver dimensions.

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5 98 L1 L2 L3 L4 2.10-14 VQZ100/200/300 Body Ported Dimensions: VQZ200 Station VV3QZ22C (5.5) (35) 2-4.5 Mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Note 2) DIN is applicble to VQZ 200 and 300. Note 3) Electrical entry of pilot valve for VQZ100(L and M) is opposite side of valve body part number.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

2 Slide screw 0.05 Without motor brake Series LXF 30 Direct acting guide Ball screw 0.03 80 3 100 0.05 Slide screw 200 2 Guide rod type Series LXP 200 3 0.05 Slide screw 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 Slide table