Digital Flow Switch (Manifold type) Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External
k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Operation status signal output Contact output signal 1 0 * The pin numbers and output signals can be set by user.
0 1 0 A 14 A B A 14 A B A B A 14 A B A 14 A B 3 2 3 2 A 14 U side D side D side U side 0 1 0 1 5 4 5 4 2 3 2 3 B 12 B 12 B 12 B 12 B 12 7 8 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-DXPD 1 set EX600-DYPB 1 set EX600-WSV1 1 set EX600-EU1 1 set SS5Y3-10S6WS72-05B-C6 (Type 10 5-station manifold base, Wireless slave) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit:
N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.
DIN terminal: VP3145-D Conduit terminal: VP3145-T A B A B VQZ VZ VS Conduit terminal with indicator light (TL) G 1/2 Light Light Max. 11 Applicable cable 6 to 12 VFN G 1/2 Rc 1/4 Rc 1/4 ( ): With indicator light (TL) 4-10-5 6 Series VP3145/3165/3185 Dimensions: VP3165 Grommet: VP3165-G A B G 1/2 Manual override Lead wire length 200 mm External pilot port Rc 1/4 Rc 1/4 (PE port) Courtesy
Stations 1 2 3 4 5 6 7 8 9 10 ZZM-CR-01 ZZM-CR-02 ZZM-CR-03 ZZM-CR-04 ZZM-CR-05 ZZM-CR-06 ZZM-CR-07 ZZM-CR-08 ZZM-CR-09 ZZM-CR-10 SP ZCUK AMJ AMV AEP (2) (3) HEP Note Quantity Adapter A Adapter B Silencer Blanking plate No. 1 2 3 4 5 6 7 8 9 10 11 Model ZZM-SA ZZM-BP ZZM-ADAZZM-ADBZZM-GE ZZM-EPLZZM-GBL ZZM-GBB ZZM-GBR ZZM-EPRZZM-CRDescription 2 1 1 Station: 1 1 1 1 Manifold part no.
Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.
C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 *2 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2 1/8 70
VCS414 VCS415 VCS 17 1 0 5 1 5 20 1 5 1 0 25 20 1 5 30 25 25 2.
2 12 For above parts of No. 7 and No. 11, the parts assembly ZA1-OP-1 (10 pcs each) is available. ZH ZU How to Order ZL ZY How to order connector assembly Solenoid valve connector assembly part no.
NVFR4100 NVFB4200 NVFR4300. 4400. 4500 o Gasket NBR vF4000-20 vF4000-20 vF4000-20 Valve mounting bolt Steel MT335-1-1 1 {M4X40) AXT335-1-11 (M4X40) MT335-1-11 {M4X40) Pilot Ass'y SF4KFx-70 (E Series NVFR40O0:Base Mounted Tlpe 2 position single:NvFF4100-OF 3 PositionlDimensians PIug-in 2 Position 2 position double:l{VFR4200-oF 3 posilion closed center:NVFRrBoo-OF 3 position exhaust center:
Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.
54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70
NVFR4100 NVFB4200 NVFR4300. 4400. 4500 o Gasket NBR vF4000-20 vF4000-20 vF4000-20 Valve mounting bolt Steel MT335-1-1 1 {M4X40) AXT335-1-11 (M4X40) MT335-1-11 {M4X40) Pilot Ass'y SF4KFx-70 (E Series NVFR40O0:Base Mounted Tlpe 2 position single:NvFF4100-OF 3 PositionlDimensians PIug-in 2 Position 2 position double:l{VFR4200-oF 3 posilion closed center:NVFRrBoo-OF 3 position exhaust center
MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LG1-1-G05 1 (for motor) 2 LG1-1-R05 MR-JCCBL5M (for encoder) DP9320081-2 (for motor) DP9320089-2 (for encoder) LG1-1-Y05 3 1 When the Matsushita Electric Industrial Co., Ltd. motor driver is selected, in addition to the cable, a power connector (MOLEX 556910R) and an interface connector (Sumitomo/3-M Limited 10126-3000VE) are also required
--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:
4 Rc(PT) 1/8 Port size Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4 Pressure gauge port Rc(PT) 1/8 (2 locations) Ambient and fluid temperature 5 to 60C (with no freezing) 0.64 0.30 0.14 0.71 0.35 Weight (kg) Note 1) With the condition of no flow on the output side.
8 1/4 1/4 Auto switch Mountable Warning (1) Check the specifications.
k HECR 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit HEC 10 Alarm status signal output Contact output signal 3 2 HEB 9 Remote status signal output Contact output signal 2 1 8 HED Operation status signal output Contact output signal 1 0 HEA * The pin numbers and output signals can be set by user.