Pressure range: 15 to 145 PSI (0.1 to 1 MPa) , Ambient and fluid temp range: 23 to 140and#176;F (-5 to 60and#176;C) , Option for meter-out or meter-in type control, One-touch fitting provides easy tube mounting/removal, Applicable tube size: °4, °6, °8, °10, and °12, Thread port size: M5, R1/8 to 1/2 , The port thread has sealant (except M5 type), to save installation time and reduce the

Pressure range: 15 to 145 PSI (0.1 to 1 MPa) , Ambient and fluid temp range: 23 to 140and#176;F (-5 to 60and#176;C) , Option for meter-out or meter-in type control, One-touch fitting provides easy tube mounting/removal, Applicable tube size: °4, °6, °8, °10, and °12, Thread port size: M5, R1/8 to 1/2 , The port thread has sealant (except M5 type), to save installation time and reduce the

Pressure range: 15 to 145 PSI (0.1 to 1 MPa) , Ambient and fluid temp range: 23 to 140and#176;F (-5 to 60and#176;C) , Option for meter-out or meter-in type control, One-touch fitting provides easy tube mounting/removal, Applicable tube size: °4, °6, °8, °10, and °12, Thread port size: M5, R1/8 to 1/2 , The port thread has sealant (except M5 type), to save installation time and reduce the

Pressure range: 15 to 145 PSI (0.1 to 1 MPa) , Ambient and fluid temp range: 23 to 140and#176;F (-5 to 60and#176;C) , Option for meter-out or meter-in type control, One-touch fitting provides easy tube mounting/removal, Applicable tube size: °4, °6, °8, °10, and °12, Thread port size: M5, R1/8 to 1/2 , The port thread has sealant (except M5 type), to save installation time and reduce the

This is a legacy product, and replaced byAS1211F-M5-07 FLOW CONTROL W/FITTING. SPEED CONTROL W/FITTING. AIRLINE EQUIPMENT. AS***F M5 STANDARD (PT). .01543 lb. AB.

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled)

Only), Vacuum Pressure Switch Unit Specs: Unit Switching Function, Vacuum Pressure Switch Lead Wire: No Connector, Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: Z [w/Light/Surge Voltage Suppressor (Type D Only)], Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled)

Type: 332 (Body Ported), Valve Option: V (For Vacuum), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: None, Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled)

Type: 332 (Body Ported), Valve Option: Standard Type, Rated Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: Z [w/Light/Surge Voltage Suppressor (Type D Only)], Port Size: M5 (M5 x 0.8), Thread: Rc with sub-plate, or Nil, Bracket: F (w/Bracket, Not Assembled)

Stations: 6 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Pressure range: 15 to 145 PSI (0.1 to 1 MPa) , Ambient and fluid temp range: 23 to 140and#176;F (-5 to 60and#176;C) , Option for meter-out or meter-in type control, One-touch fitting provides easy tube mounting/removal, Applicable tube size: °4, °6, °8, °10, and °12, Thread port size: M5, R1/8 to 1/2 , The port thread has sealant (except M5 type), to save installation time and reduce the

Pressure range: 15 to 145 PSI (0.1 to 1 MPa) , Ambient and fluid temp range: 23 to 140and#176;F (-5 to 60and#176;C) , Option for meter-out or meter-in type control, One-touch fitting provides easy tube mounting/removal, Applicable tube size: °4, °6, °8, °10, and °12, Thread port size: M5, R1/8 to 1/2 , The port thread has sealant (except M5 type), to save installation time and reduce the

Stations: 8 Stations, Port Size: M5 (M5 Thread), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

The SYJ Valve is an innovative combination of space efficiency and performance superiority which provides real value to the design solution. Whether designed in a manifold or used as a single valve, this small profile increases design flexibility and minimizes space requirements. The SYJ valve utilizes a low power (0.5 watts standard) pilot solenoid design, which dramatically reduces thermal

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Type: N (Rubber Bumper), Bore: 40mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 75mm, Thread: F (Female Rod End), Suffix for Cylinder: w/o Rod Boot

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

Air-hydro Unit

35 CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Special Specifications:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Body size Thread type (3) 2B 4B 8B 11B 22B 37B 75B Nil Rc F G N NPT Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body.