HRX-OM-X037

Table 9.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC NRTL *1 E112803(UL61010-1) *1: Except option-T2 and T3,water-cooled type.

2–4

HS A B Reed switch Solid state switch D-A7 H D-A80H D-F7 D-J79 D-F7 W D-J79W D-F7BAL D-F7 F D-F7NTL 32, 40, 50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-F7LF D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs A B Hs 32 40 50 32.5 36 42 10.5 13 16 13.5 17.5 15.5 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore

21

H1 5 H2 8 MM NN 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 Width across flats 6 length 3.5 31 27.9 M8 x 1.25 M20 x 1.5 Width across flats 8 length 3.5 30 17.5 15 17 32 10 26 13 10.5 6 34 6 8 33.4 M10 x 1.25 M26 x 1.5 Width across flats 10 length 3.5 34.5 17.5 15 17 32 12 26 13 10.5 8 34 6 8 37.4 M10 x 1.25 M26 x 1.5 Width across flats 12 length 3.5 42.5 23.5 20.5 22 41 14 32 16 13.5 8 42

Electric Slide Tables

36 Encoder (Angular displacement sensor) Rated voltage [V] Power consumption [W] Note 4) 97 16 (Horizontal)/32 (Vertical) 111 42 8 (Horizontal)/19 (Vertical) 71 Standby power consumption when operating [W] Note 5) Max. instantaneous power consumption [W] Note 6) Type Holding force [N] 300 48 500 77 4 5 24 2.5 Note 7) Power consumption [W] Note 8) 3.6 24 VDC 10% Rated voltage [V] Note 1)

MXS Series Air Slide Table

Q Q MXS Series Q Q Q Product Features .pages 42-43 Q Q MXS Series Q How to Order .page 44 Specifications.pages 45-46 Q How to Select .pages 47-48 Q Table Deflection .pages 49-50 Q Stroke Adjuster .pages 51-52 Construction/ Parts List, Seal Kits .page 53 Q Dimensional Drawings.pages 54-65 Q How to Order MXS L (Symmetric type) .page 66 Dimensional Drawings MXS L (Symmetric

Environment

30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 60 LEJ Lead 3: LEY25C 50 20 LEL Lead 6: LEY25B 40 Lead 6: LEY25B 15 30 LEM 10 20 18 Lead 12: LEY25A 7 LEY LEY 12 10 Lead 12: LEY25A 0 0 LES 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEPY LEPS LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 LER 90 50 80 Lead 4: LEY32C LEH 40 42

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

OMR0032

Controller Set Up . 42 9.1 Communication Speed and Controller IDs . 42 9.2 Selection of the input type . 42 9.3 Basic parameter setup . 43 9.4 Movement Profile Recommended for Pulse Input Type . 48 (1) Positioning time . 48 (2) Recommended movement profile . 48 9.5 I/O setup . 49 9.6 Step Data setup . 50 10. Monitor and Test Mode of the Controller . 51 11.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 14 Series MQM Refer to the basic type on page 13 for other dimensions.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Positioning repeatability [mm] 0.04 Lost motion [mm] Note 3) 0.1 or less Lead [mm] 27 42 Impact/Vibration resistance [m/s2] Note 4) 50/20 Actuation type Belt Guide type Linear guide Allowable external force [N] 20 Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Regenerative resistor May be required depending on speed and work load.

IN20267

Installation and Handling . 42 17. Air supply . 42 17.1. 3 - IN20267 Operating environment. 42 17.2. Do not use the product in a food zone: . 42 17.3. OK to use the product in: . 42 17.4. Non-food zone An environment in which foods do not contact the cylinder: . 42 17.5. Do not use in an area where surges are generated: . 42 17.6. Installation . 43 17.7.

Integrated Controller

Refer to the specific product precautions (Handling) in the Web Catalog when mounting end brackets such as knuckle joint or workpieces. 16 13 12 16 5 14 24.5 14 M8 x 1.25 25 22 20.5 20 8 17 38 23.5 M14 x 1.5 32 22 20.5 25 8 22 42 23.5 M14 x 1.5 The L1 measurement is when the unit is in the original position. At this position, 2 mm at the end.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42

CQM

HS A B Reed switch D-A7H D-A80H Solid state switch D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL 32/40/50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs 32 40 50 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW

CLS

M30 x 1.5 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42

MTS

31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5 102.5 102.5 102.5

Output block / Power block

The Output block for high wattage load and a Power block must be used when the current consumption exceeds the rated load current of 42 mA.

MHF2

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 MHZ MHF MHL 4-M6 x 1 thread depth 15 MHR Mounting thread MHK 6 159 6 MHS 62 174 2-M6 x 1 thread depth 6 MHC Mounting thread 33 144 MHT E MHY 13 25 25 30 MHW 41 MRHQ E 4-5.2 through (Mounting hole) 0 -0.1 Misc. 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth

Compact Type

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15